α PneuAlpha HARDWARE MANUAL

, and Z Noise Immunity 1000Vpp, 1 microsecond, 30 100 Hz, tested by noise simulator Humidity 35 85% Relative Humidity, no condensation Description Specication Conforms to IEC 68-2-6; 10-57 Hz: 0.075 mm Constant Amplitude 57-150 Hz: 9.8 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) Conforms to IEC 68-2-6; 10-57 Hz: 0.15 mm Constant Amplitude 57-150 Hz: 19.6

PSE550/300

Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, 0.19952 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .20580 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .44092 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .14109 lb

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

VCL

Please consult with SMC regarding other voltages. 3/4 (20A) Orifice size Electrical entry Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 G Grommet C Conduit Refer to the below table for orifice and port size combinations.

Air Cylinder CP Series Cylinder Positioner Assembly

Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

(with no condensation) Ambient humidity range Resistance 10 to 500Hz at whichever is smaller of 1.5mm amplitude or 98m/s acceleration, in X, Y, Z directions for 2 hrs. each (de-energized) Vibration resistance 980m/s in X, Y, Z directions, 3 times each (de-energized) Impact resistance 0.5% F.S. or less based on 25C Temperature characteristics Power supply/Output connection: 8P connector, Sensor

assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $3.81 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-51A-C6 fitting assy, VQ1000/VQ20/VQ30 VALVE (sold in packages of 10; price

PSE200

(with no condensation) Ambient humidity range Resistance 10 to 500Hz at whichever is smaller of 1.5mm amplitude or 98m/s acceleration, in X, Y, Z directions for 2 hrs. each (de-energized) Vibration resistance 980m/s in X, Y, Z directions, 3 times each (de-energized) Impact resistance 0.5% F.S. or less based on 25C Temperature characteristics Power supply/Output connection: 8P connector, Sensor

PSE540/560

to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20

Digital Flow Switch For Air/Water Series PF2A/PF2W

UP button ( button) t y u i Use to select the function. SET button ( button) y Use to change the mode or decrease the set value. DOWN button ( button) Use for changing the function.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Foot/(L) Cushion valve Port LY 4-LD LH LT X Y X Y LX LS + Stroke LZ ZZ + Stroke (mm) Foot Stroke range Bore size (mm) LX LT LS LH LD Y ZZ X LZ LY 32 40 50 63 80 100 53 59 72.5 82.5 32 38 46 56 72 89 3.2 3.2 3.2 3.6 4.5 4.5 128 132 148 148 174 178 30 33 40 45 55 65 7 9 9 12 12 14 9 11 11 14 14 16 162 170 190 193 230 234 22 24 27 27 30 32 50 55 70 80 100 120 up to 700 up to 800 up to 1000 up

VCS

Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

Booster Relay Series IL100

62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).