Micro-Mist Separator with Prefilter Series AMH 66 17 10 218 80 22 10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room
Internal data error. 16-3-10 10 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 1: Initial Setting 1 Channel selection MPa kPa OUT1 OUT2 CH 1 2 3 4 CH2 CH3 CH4 CH1 PRESSURE ZSE ISE SET PSE SET button and hold for 2 seconds or longer.
Display protective cover P2992136 14-8-36 3 Series IC Controller for Electro-pneumatic Regulator Specifications Pressure range 0.1 MPa 0.5 MPa 0.9 MPa 0.1 MPa Proof pressure 500 kPa 500 kPa 1.5 MPa Fluid Air/Non-corrosive gas Dimensions 48 x 48 x 100.5 Power supply 12 to 24 VDC (15 W or more), Ripple (p-p) 1% or less qNo. of inputs: Up to 10 bit input from sequencer (parallel) Input method
Precautions FH100-06 to 24: Nominal filtration 10 m q Mounting Confirm IN and OUT before mounting.
LCD 4.DIN 30mm 30mm 10 - 2-2 30mm No. 2-3 (1), (Err6), 1 ML2B25 15 ML2B32 19 ML2B40 24 2-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm30mm Err6: 20 30 100mm/sec :50cm :0.5MPa 11 - 3 3 3 3 ML2B+CEU2 NO 1 () () YES NO () YES NO YES YES NO YES NO YES YES NO NO NO YES A 12 - A 1.
Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.
) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.
MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20
MPa 500 kPa 500 kPa 1.5 MPa 0.1 kPa 0.1 kPa 0.001 MPa DC1224 V 10(P-P)10() 40 mA NPN PNP 1 NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms (2010050010002000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 2 1F.S. 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 12 V 300 24 V 600 50 3 4 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1 OUT2 IP40 050 -1060 () 3585RH
Hysteresis 0 to variable 7 Withstand pressure 600 kPa Detection nozzle 1.5 4 Current flow 5 L/min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 2 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at
The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.
to 40 Parallel style MHZL2 10 to 25 Wide type MHL2 10 to 40 Parallel style MHS2 (2 fingers) 32 to 63 Auto switch mounting screw Parallel style MHS3 (3 fingers)/MHS(L)3 32 to 63 Parallel style MHS4 (4 fingers) 32 to 63 Auto switch Angular style MHC2 10 to 25 1.
4 inputs 1 input Calibration method Push-button calibration Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 to 1 MPa 10 to 101 kPa 100 to 100 kPa 10 to 100 kPa 50 to 500 kPa 0.1 to 1 MPa 10 to 101 kPa 101 to 101 kPa 10 to 100 kPa Set pressure range 0.2 to 2 kPa
bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167
Rotating Torque/Permissible Number of Rotations Applicable tube O.D. 5/32/4 1/4/6 5/16/8 3/8/10 12 Rotating torque in-lbf (Nm)NOTE 1) 0.053 0.106 0.124 0.177 0.195 (0.006) (0.012) (0.014) (0.020) (0.022) Permissible number Series KS 500 500 400 300 250 of rotations Series KX 1500 1200 1200 1000 1000 Note) Value under pressure 73psi (0.5MPa).
zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w
Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.
0.7 0.5 to 500 Series MQM Lateral load resisting low friction cylinders for low pressure, low speed, uniform speed, low friction high pressure, high speed and high speed response (high frequency) actuation Series Bore size (mm) Stroke (mm) Operating pressure range (MPa) Actuation speed (mm/s) 15 30 45 60 75 100 6(standard only) 10 16 20 25 MQML Standard type 6: 0.02 to 0.7 0.5 to 1000 10