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13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position of the pressure gauge is above the center of the piping. 76 AR20-B to AR60-B Regulator Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

EX500-DX B Install the product using 2 M5 screws x 20 mm minimum with a head 9 to 11. NOTE Refer to the product catalog or SMC website (URL http://www.smcworld.com) to obtain more detailed information about product specifications. 1 3 5 7 9 11 13 15 The direct current power supply to combine should be UL1310 Class 2 power supply when conformity to UL is necessary.

For detailed description of the signals, refer to the following pages. 15 (2) Internal circuit (Numbers in brackets indicates the pin numbers) (5) PWR_DC24V LF (6) PWR_GND Output signal GND (9) CTR (10) CYL (11) VAL (16) RF (17) PWR Max.

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

(Refer to page 11 for details.) When compressed air containing ozone (possibly generated from other machinery and equipment present in a plant) enters a pneumatic system, it adversely affects the system's rubber components.

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. Design Piping Caution Caution 1. Not suitable for use as a selector valve or a divider valve. The valve can malfunction due to air leakage. 2. Not suitable for vaccum applications. The valve can malfunction due to air leakage. 3. Do not supply air pressure from other ports than 1(P) port.

bore depth 3.3 3 3 OUT 9 2-1.2 x 12l AW (spring pin) 1 (16) 5.6 3.2 28 0.2 28 0.2 22.7 37 35 16 6.3 5 2.1 M3 x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

No.EX-OMP0004CN-I SI (CC-Link ) // EX260-SMJ 2 8 9 10 10 11 LED 16 21 26 26 27 28 -1No.EX-OMP0004CN-I (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.

NPN) C76 IC 5 V Grommet C73 B54 C73C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA H7NF 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Yes Connector 12 V 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC Grommet DIN terminal Diagnostic indication (2-color) 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Grommet 12 V 2-wire Connector 3-wire (NPN) 2-wire