Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

ZZ + Stroke H 3.5 (mm) ZZ S P I E D A H H1 13.5 10.5 10.5 10.5 FL Bore size H2 41 32 32 26 B2 22 17 17 13 B1 AL K 11 8 8 8 13 F 12 10 8 6 KA MM NA NN G 0 50 45 45 41 6 6 5 8 8 8 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 14 12 10 8 20-0.033 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M26 x 1.5 M26 x 1.5 M20 x 1.5 46.5 37.5 33.5 28 7 5.5 5.5 5 42.5 34.5 30 24 154 122 120 116 1/8 88 64 62 62 16

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Assembly Clamping workpiece INDEX Series Variations Applicable auto switch Page Bore size (mm) 10 16 20 25 32 40 50 Solid state switch D-M9/F9W type Transferring workpiece Cam style Series MHY 12-10-8 to 12-10-15 Solid state switch D-Y5/Y6 type D-Y7 type Y7W type Clamping workpiece Rack & Pinion style Series MHW 12-10-16 to 12-10-24 12-10-2 12-10-3 3 Series MHY2/MHW2 Model Selection Model

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Assembly Clamping workpiece INDEX Series Variations Applicable auto switch Page Bore size (mm) 10 16 20 25 32 40 50 Solid state switch D-M9/F9W type Transferring workpiece Cam style Series MHY 12-10-8 to 12-10-15 Solid state switch D-Y5/Y6 type D-Y7 type Y7W type Clamping workpiece Rack & Pinion style Series MHW 12-10-16 to 12-10-24 12-10-2 12-10-3 3 Series MHY2/MHW2 Model Selection Model

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

CLA

111 13 17 I M 26X t.5 Wtthout boot PG H ZZ o. 42 11 20 45 153 8 60 9 12 SO 42 100 51 215 52 \Bore size MM PH PL PW S W FV eFO FT FX FY FZ ) (mm) XI US N P t 40 "I ,~20 27 " 1 50 30 % 46 10 2' 50 168 a 70 9 12 90 50 110 58 237 58 48.5 13 23 60 182 0 86 i-11 .5 15 105 59 130 58 25 ; 58 55 15 23 70 208 0 102113.5 18 130 76 160 71 296 80 f 63 :y ~ . 16 31 % Slroke ~ 65 21.5 80 305 80 37 " 1 100

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

VZS

100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220 VAC, 50/60 Hz G 2 position double 5 6 9 24 VDC 12 VDC Note) Indicator light is not available for grommet type.

CE2

58 0 254 3/8 187 334 31 M18 x 1.5 stroke 80 12.5 65 372 71 0 284 1/2 205 37 381 M22 x 1.5 81 14 65 389 72 0 300 1/2 214 398 40 M26 x 1.5 Foot style LS + Stroke ZZ + Stroke LD ZZ Y X LX LS LH B Bore size (mm) 40 50 63 80 100 9 309.5 13 27 42 272.5 40 58.5 9 333.5 13 27 50 289.5 45 68.5 11.5 362 16 34 59 322 50 83 13.5 415 16 44 76 372 65 100 13.5 432 17 43 92 386 75 114 10-12-50 8 Stroke

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

Compact Cylinder with Air Cushion

O M J E D B K ( across flats) 11.5 depth 7.5 34 9 25 7 12 YB-03 32, 40 H (With locking) 14.5 depth 8.5 42 11 32 9 12 YB-05 50, 63 18 depth 12 52 13 38 11 16 YB-08 80 d1 d2 21 depth 14 62 17 50 14 19 YB-10 100 L UT Weight (g) Bore size (mm) Part no. RS W T1 T2 V C UA Material: Chrome molybdenum steel (nickel plated) 9 50 80 18 6.5 10 YB-03 32, 40 Part no.

Cylinder with Lock Series CNG

M8 x 1.0 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204) 28 M10 x 1.25 6 14 M14 x 1.5 44 1/8 2.5 81 169 (178) 12 4 12 50 35 17 70 241 (250) M6 x 1 depth 12 10 (12) 221 (230) Note) Dimensions inside ( ) are for long strokes. 5 Cylinder with Lock Series CNG Double Acting: Single Rod Dimensions (mm) 1in = 25.4mm Basic type (B): With

High Power Cylinder Series RHC

HS 8.5 SMC SMC SMC SMC 16 16 A 29 Auto switch B A 26 Auto switch B (36) D-B5/B6/B59W type 20 to 40 D-G5NTL type 20 to 40 50 to 100 50 to 100 Approx. HS Approx. HS 12 12 SMC SMC 24.5 24.5 A 33 B A 33 Auto switch B D-C73C/C80C type 20 to 40 D-H7C type 20 to 40 50 to 63 50 to 63 Approx. HS Approx.

Air Cylinder Series MB

151 172 212 50, 63 80, 100 249 125 Rear flange Rear flange/(G) Bore size (mm) Stroke range ZZ B FD FT FX FY FZ Port Cushion valve 4-FD 32 40 50 63 80 100 141 145 164 164 202 202 125 to 1000 138 14 20 180 102 216 237 to 500 to 500 to 600 to 600 to 800 to 800 50 55 70 80 100 120 7 9 9 9 12 14 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 FY B Without air cushion

Digital Flow Switches, Series PF2A, Series PF2W

White Load 50 OUT2 2 12 to 24VDC + Load (41.5) 3 Blue PF2W7T--67(-M) Connector pin numbers 4 3 77 34 2 1 Pin no.

Thermo-chiller

Hz*3 kW 2.0/2.5 Temperature stability*4 C CH1: 0.1, CH2: 0.5 Circulating fluid system Rated flow 50/60 Hz*5,*12 L/min CH1: 25/35 (0.5 MPa), CH2: 2/2 (0.5 MPa) Max. flow rate 50/60 Hz*12 L/min 55/65 Max. pump head m 50 Settable pressure range (-P) MPa 0.1 to 0.5 Min. operating flow rate 50/60 Hz*6 L/min CH1: 25/35 (-P: 15), CH2: 1/1 Tank capacity (CH1, 2 total) L Approx. 18 Circulating fluid

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Refer to pages 8-13-12 to 8-13-13 for detailed selection procedures. 8-13-6 7 Model Selection Series MY2 Moment/MY2C MY2C/M1 MY2C/M3 MY2C/M2 50 40 50 40 50 40 30 30 30 MX 20 20 20 MTS MY 10 10 10 MY2C40 CY Moment Nm Moment Nm Moment Nm MY2C40 MY2C40 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

MHZ2/MHZJ2

12 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 +2.2 0 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.4 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 0 -0.05 9.7 9.7 12.6 12.6 17.2 17.2 22.8 22.8 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3