PSxx-OMM0002CN

kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

NARM Series

Flow (SCFM) Supply pressure 100 psig Secondary pressure 30 psig Flow rate .7 SCFM Pressure Characteristics Mounting/Adjustment 2) On the NARM3000, pull the adjustment handle to release the lock. (An orange colored line is provided at the bottom of the adjustment handle for visual checking.) Push the adjustment handle to engage the lock.

AL800/900

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

VCB

Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Symbol 01 02 03 04 06 Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Orifice size Please consult with SMC regarding other voltages.

NVZseies

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. Installation of Threads Caution Selection Caution KQ2 1.

PSxx-OMV0003CN

No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

PSxx-OMV0008CN

No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -78No.PS-OMV0008CN-E No.

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

Speed Controller with One-touch Fittings Series AS In-line Type 1

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Digital pressure switch for energy-saving control ejector

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

VVXA21/22

86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21 VVXA22 A 38 49 B 20.5 [17.5] 26.5 [22.5] Model VVXA21 VVXA22 C 10.5 13 D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

K35-OMX0029

signal power supply 24V 13 CAL 14 E-STOP *1 *1 When the air servo cylinder is operated, turn ON the E-STOP signal.

MGP-OM0242Q

Clean Series / Precautions 13 13. Troubleshooting 17 14. Auto Switch 18 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

10 223 212.5 191.5 16 11 235.5 225 202 17 12 248 237.5 212.5 18 13 248 237.5 223 12.5 14 260.5 250 233.5 13.5 15 273 262.5 244 14.5 16 285.5 275 254.5 15.5 L1 L2 L3 L4 32

IDX-OM-W095

. 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

VFS4000-OMY0001

No.VFS4000-OMY0001 / / VFS4000 . 1,2 1 . 3,4 2 1) . 5 2) . 6 3 . 7 4 . 7 5 1) DIN . 8 2) . 9 3) . 912 6 . 12 7 . 12 8 . 13 9 . 13 10 . 13 11 . 14 . 15 . 16 No.VFS4000-OMY0001 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical