NCA1

CB CD DD E F FL LR M MR R NCA1-P150 3/4 1/2 13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 CD dia. DD dia. Clevis Bracket AA 2.3 3.6 1 5/8 2 9/16 0.785 1.265 1/2 3/4 1/2 5/8 3/8 -24 1/2 -20 2 1/2 3 1/2 3/8 5/8 1 1/8 1 7/8 1/2 1 1/16 1/2 3/4 9/16 1 1/16 Part no. BA CB CD CW DD E F FL LR M MR NCA1-CB150 NCA1-CB325 DD dia.

energy saving effect

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

CLQ

Applicable bore size (mm) 32, 40 11 60 22 6.5 12 YB-05 50, 63 120 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-03 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-05 14 75 28 8.5 16 YB-08 80 230 M16 x 2 80 24.8 23 13 90 9 22 8 20 YU-08 18 90 36 10.5 18 YB-10 100 455 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 YU-10 18 For details on each auto switch, refer to pages starting with 5.3-2 of "Best Pneumatics

Compact Cylinder with Lock Series CLQ

L D d m t d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft C type 18 for shaft C type 22 for shaft 20 25 32, 40 50, 63 80 100 21 25.6 41.6 50.6 64 72 7.6 9.6 9.6 13.4 17 21 16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.55 1.55 2.05 2.55 2.55 0.9 1.15 1.15 1.15 1.35 1.35 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 13 17 22 27 32 41

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

NCA1

CB CD DD E F FL LR M MR R NCA1-P150 3/4 1/2 13/32 2 1/2 3/8 1 1/8 3/4 1/2 9/16 1.63 NCA1-P325 1 1/4 3/4 17/32 3 1/2 5/8 1 7/8 1 1/4 3/4 7/8 2.56 CD dia. DD dia. Clevis Bracket AA 2.3 3.6 1 5/8 2 9/16 0.785 1.265 1/2 3/4 1/2 5/8 3/8 -24 1/2 -20 2 1/2 3 1/2 3/8 5/8 1 1/8 1 7/8 1/2 1 1/16 1/2 3/4 9/16 1 1/16 Part no. BA CB CD CW DD E F FL LR M MR NCA1-CB150 NCA1-CB325 DD dia. CD dia.

TABLE OF CONTENTS

T orque 4 : 4.4 LB . in 1 .39 (9.9) RECEPTACLE WITH .37 (9.4) SPACING 1.02 (25.9) .13 (3.3) DIA.

New

9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Fluoropolymer Piping Equipment

136 127.5 49 22 13 50 55 (E, E) (E, E) L1, L1 L2, L2 Panel hole diameter K Inch Size Model Applicable tubing O.D.

EXxx-OMY0006CN

EX245-DX1EX245-DY1 EX600-ZT1 1 88 EX600-ZT1 Fig. 13-1 EX600-ZT1 80 No.EX##-OMY0006CN 13.2. Y Y (EX245-DX1EX245-DY1) Y 2 2 x M12 M12 2 x M8 M12 PCA-1557785 Y (2 x M12 M12) Fig. 13-2 PCA-1557785 81 No.EX##-OMY0006CN PCA-1557798 Y (2 x M8 M12) Fig. 13-3 PCA-1557798 13.3. EX245-FPS1/2/3EX245-DX1EX245-DY1 M12IP65 EX9-AWTS (M12 10 ) Fig. 13-4 EX9-AWTS 0.2Nm 82 No.EX##-OMY0006CN 14. 14.1.

HRX-OM-W038

Press the [SEL] key 13 times. The set screen of data reset is displayed on the digital display. PV SV 3. Select from the table below with [] key or [] key, and confirm by pressing SEL. Select , then all data returns to default setting. The display returns to the main screen.

HRX-OM-O021

Fig. 3-12 Tightening of piping Recommended piping circuit Fig. 3-13 Recommended piping circuit No. Description Size Recommended part no. Note 1 Valve Rc1/2 2 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter.

HRX-OM-R005

Fig. 3-12 Tightening of piping Recommended piping circuit Fig. 3-13 Recommended piping circuit No. Description Size Recommended part no. Note 1 Valve Rc1/2 2 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter.

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

JXCx-OMT0061CN

PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

26 5 8 22.3 34 M8 X 1.25 M20 X 1.5 41 8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot

ZU

Pmax P1 Vacuum pressure Qmax Q1 Suction flow rate 13-6-4

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)