Body Size: 20, Backflow: w/Backflow Function, Thread: NPT, Port Size: 1/4, Mounting: w/Set Nut, for Panel Fitting, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units: psi

Body Size: 30, Backflow: w/o Backflow Function, Thread: NPT, Port Size: 1/4, Options: w/Set Nut, for Panel Mount, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting

Body Size: 25, Backflow: w/o Backflow Function, Thread: NPT, Port Size: 1/4, Options: w/Set Nut, for Panel Mount, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting

Body Size: 20, Backflow: w/Backflow Function, Thread: NPT, Port Size: 1/4, Options: w/Set Nut, for Panel Mount, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: H (w/Set Nut, for Panel Mount), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Mounting: H (w/Set Nut, for Panel Fitting), Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units: psi)

Body Size: 30, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: H (w/Set Nut, for Panel Mount), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Special Applications: 10-AR (Clean Series), Body Size: 20, Reverse Flow: K (Reverse Flow Mechanism), Thread: N (NPT), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Fluoropolymer Piping Equipment

21 52.5 50.5 48.5 45.5 29 25 7.5 LQ3E41-R2 8 6.4 LQ3E51-R1 19 12 7 14 26.5 24 24 22 32 24 64 61.5 58.5 56.5 37 29 9.5 LQ3E51-R2 10 22.5 19.5 21 61.5 53.5 50.5 25 7.5 LQ3E61-R1 25 19 8 18 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3E61-R2 12 24 22 24 74 64.5 62.5 29 9.5 M1 H1 1/4 (E1, E1) A side L1, L1 B B side Inch Size M2 C Model A side B side B C E1 E1 E2 E2 H1 H2 L1 L1 L2 L2 M1 M2 Min

Table of Contents

19 21 19 21 21 21.8 21 21.8 21 21.8 18.8 21 18.8 21 21 23 21 23 21 23 23 23.8 23 23.8 23 23.8 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 Dimension with cover Reference dimension of NPT thread after installation. 1/4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7

ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

4/5 Port Air Operated Valve Series SYJA3000

(DIN 62.8) 62.3 (DIN 63.6) R P R A B A B A B A B A B 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 17 21 60 1/4 (P, R port) Manual override 1/8 (A, B port) (Pitch) P = 19 23.5 Built-in One-touch fitting (Station n) (Station 1) (Light/Surge voltage suppressor) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" 58.5 [65.5] + + + + + 43.1 26.5 (4.9) 63 L plug connector (L) M plug

SQ1000/2000

B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

Series SV

] SV300(R)-W-02, 03 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 2-4.3 (Mounting hole) M5 x 0.8 (Pilot EXH port) 21 21.5 A B PE 38 46 SMC A B A B B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 6.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.5 58.7 26.5 13.5 11.5 5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

High Purity Fluoropolymer

C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

SV

SV3000-00Interface regulator 82.7 Individual EXH spacer 63.8 60 SV3000-M1Interface regulator 12 (For DIN rail mounting) (10) 14.7 n1 = Valve stations n2 = Input block stations B B B B 157.9 139.9 L2 = L110.5 L3 = 20.5 x n1 + 70.5 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 20.5 x n1 + 56 L7 = 21 x n2 + 83.5 A A A A B A B A B A B A L1: DIN Rail Overall Length (mm) Valve stations (n1) 2 3 4

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4)