Special Specifications: -9 Mist Separator 14-20-16 Micro Mist Separator 14-20-22 Odor Removal Filter 14-20-42 Note: Some models have different heights depending on the port size.
Bar stock type 20 S Y E Valve Series Efsvsooo ] EI SYsOOO I -svzooo ] None Foot (Sinole solenoid onl Side Type of Actu.
Basic type RBC10S RBC14S RBC20S RBC27S With cap A B 9 12.5 16 21 SR 8.7 12 18 25 MM h M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 6 6 6 C 14 19 27 36 B M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f MM RBC10C RBC14C RBC20C RBC27C RB10J RB14J RB20J RB27J RB10S RB14S RB20S RB27S 7.5 10 20 25 16.2 21.9 31.2 41.6 14 19 27 36 16.2 21.9 31.2 41.6 8 11 16 22 23 31 40 51 11 15 23 32 15 20 25
2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions
20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5 10 15 20 25 0 0 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) Viewing the flow rate characteristic graphs The flow rate characteristics indicate the relationship between the vacuum pressure and the suction flow rate of the ejector, and
S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5
S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 10 16 20 25 32 30 60 80 40 100 160 200 Nil 1 2 40 80 100 20 40 60 50 100 120 70 120 160 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type
22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International
Refer to Flow Characteristics (page 14-20-38) and figure of Max. Air Flow (page 14-20-38).
Refer to the Made to Order Specifications on page 20.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Compact hydraulic cylinder conforming to JIS Series CHKDB Nominal pressure (MPa) Bore size (mm) Stroke (mm) Action Fluid Series CHKDB CHKGB 20 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Compact hydraulic cylinder Series CHKGB 25 RE A B Hydraulic fluid 5, 10, 15, 20, 25, 30 35, 40, 45, 50, 75 32 Standard mineral hydraulic fluid W/O hydraulic fluid O/W hydraulic fluid REC Light and compact alminum
External Grip Internal Grip MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 0.6 MPa Pressure Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa External grip 0.5 MPa 6 6 0.4 MPa 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 0.6 MPa Pressure Pressure
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.
M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD