Pulse Valve

Tightening Torque for Piping Size Wrench tightening angle Tightening torque 1 (25A) 10 to 15 50 to 100 Nm Procedure for installing the valve on the tank Connection thread Proper tightening torque [Nm] Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/2 40 to 42 5.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm Scale: 50% With auto switch: MDSUA20-S 21.5 72 31 34.5 26.5 25.5 (34.5: Connector type) Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 31 25 20.5 (26.5: Connector type) 50 65 Connector type 8 4 Connector type 10 Series MSUA Rotary Table High Precision Type Construction Single vane 180 (Indicates intermediate position) 90 (

AC Servo Motor Driver (CC-Link Type)

If over a certain period of time in the state of the pressing position, an overload alarm (AL 50, AL 51) occurs for driver protection. (1) Devices, parameters Set the input devices and parameters as follows: Item Device/Parameter used Description Automatic/manual selection (RYn6) (MD0) Turn RYn6 ON.

PSxx-OMV0003CN

NPT1/4 F02 G1/4 2 A A B B :ISO1179-1 IO-Link/1+2 NPNorPNP 1 M12 5m M12 5m L2 S L 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-31-B 5 m M12 ZS-31-C 5 m -8No.PS-OMV0003CN-G M12 4 24 OUT1 IO-Link OUT2 UP DOWN SET () ()() (() UP ON/OFF DOWN ON/OFF SET IO-Link OUT1 (SIO ) -9No.PS-OMV0003CN-G IO-Link IO-Link 1 Operate () Start up Preoperate IO-Link 2 IO-Link 1 SIO

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

FSQ seies

> r l ii_9N c]0 v tadiris:10 Bore size d32, 040, d50/FSEOB32, 40, 50 _ 2 1 ?q o 9 l l / 10i11) 20\22) M 1 0 . 2 E Min. lead wire bending radius: 10 rNole 4lTh I our shows an o.rendedpisron tod .Note Jl Lor ( lare arhro. olF roLcF -.os re p'o{deo onr o_ rFe oo qde, lNole 1l Dimensions for moders wlhoutan aulo sw ich ar61he same as the above.

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

JXCx-OMT0028CN

200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Smooth Cylinder Series CQSY

22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of

For Water Digital Flow Switch Series PFW

DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106 Model PFW504 PFW520 PFW540 62 78.2 120 1.6 23 50 60 34 2-Port size 4-4.5 34 50 40 48 (43.5) Flow direction 25 Series PFA Dimensions/Remote Type Display Unit for Water PFW3-A Panel mount type Internal circuits and wiring Sensor 41.8 Blue Brown Black N.C. 40.3 40 1 2 3 4 4.3 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

-- NCM seies

40-140'F(5-m'c 2 -20 inch/sec {50 -500 mm/sec) 2 -30 jnch/sec (50-750 mm/sec) Not required (prelubricated at factory) Standard Stroke LLst Owhen mounting, completelyflush the piping and be careful that dust and chips do not erterthe cylinder. )Load of piston rod should always be aligned parallel with the cylinder axis.

DOC1003626

multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18 HRS400-A-46 DOC1003626 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure . 3-19 3.13.4 Circulating fluid electrical conductivity . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21 3.13.7 Data display . 3-22

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Repeatability Maximum operating frequency 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 3 Grease Cleanliness class (ISO class) 938 Rotary Actuated Air Gripper MHR3 1122Auto Switch Specifications (Refer to the WEB catalog for further information on auto switches.)

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Metric size Type (Recommended flow rate) ZL Symbol Tubing size Metric size (Release bushing: Light gray) Symbol Tubing size Applicable model Flow rate l/min (ANR) 04 100 200 Max. 20 Max. 50 4 ZFC100 ZFC100 ZFC200 ZFC200 ZY 06 6 ZF 08 8 ZP Specifications SP ZFC100-04X17 ZFC100-06X17 ZFC200-06X17 ZFC200-08X17 4 10 6 20 6 30 8 50 Model Connecting tube O.D.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

to 500 mm/sec) Rubber bumper: 2 to 30 in/sec (50 to 750 mm/sec) Piston speed Rubber bumper Option (No additional charge on 7/8" and 1 1/4" bore) Lubrication Not required (Pre-lubricated at Factory) Mounting B, C, E, R Note) R mount available on 3/4", 1 1/16", and 1 1/2" only.

PVC Quick Drain Valve

or less Nitrogen gas Ultrapure water Sulfuric acid (except fuming sulfuric acid) Note 2) Concentration 30% or less Phosphoric acid Concentration 50% or less The material and fluid compatibility check list provides reference values as a guide only.

06-mgz-e

Contents Bore size (mm) MGZ20-PS 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS @0 21 Rod seal A MGZ25-PS Rod seal B 21, 22, 23 and 24 are non-replaceable parts, so they are not included in the seal kit.

Digital Gap Checker

Detection nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3