ZP

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Step Motor Controller (Servo / 24 VDC)

After the parameter is changed, it is necessary to reapply the power. input 53 - The motor speed exceeds a specific level due to an external force, etc. Make improvements such that the motor speed will not exceed the maximum speed of the electric actuator.

Compact Cylinder with Air Cushion and Lock Series RLQ

32 221 351 326 373 263 63 22 53 32 288 523 498 518 263 Bore size (mm) Magnet Thread Nut Rod end male thread Foot style (including mounting bolt) Rod flange style (including mounting bolt) Head flange style (including mounting bolt) Double clevis style (including pin, retaining ring, bolt and flat washer) With bypass piping Calculation (example) RDLQD32-20M-B Basic mass: RLQA32-20. 531 g

Series VS

119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105 H 20.5 I 26.5 J 20.5 K 30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5 T SIZE 1 SIZE 2 SIZE 3 189.5 125 9 52 52.5 64.5 96.5 112 26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36 69 82.5 121 74 28 4 234.5 142.5 13 77.5 79.5 92 108 123.5 CC 188.5 199 244 SIZE 3 SIZE 2 57.5 1.5 U V 14 25 43 W X 2 42 Y Z 133 AA BB SIZE 1 1 73 56 35 53

Drain Separator for Vacuum Series AMJ

16 41 40 23 6.5 8 53 2.3 158 (160) 53 1/4, 3/8 AMJ3000 70 205 (206) 18 70 17 50 54 26 8.5 10.5 70 2.3 194 (195) 3/8, 1/2 AMJ4000 90 284 (285) 24 90 23 70 66 35 11 13 90 3.2 273 (274) 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

Process Valve Series VNA

indicator light: DL) Pilot port 12(P1), 10(P2) L (Conduit terminal: T) Manual override (Non-locking push type) J (DIN terminal: D) I (Conduit: C) H (Grommet: G) G (Air operated) Main port (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Note) K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53

Micro Mist Separator Series AFD20/30/40

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S (mm) With bracket Accessory specifications With auto-drain Port size Standard specifications Model M 2.3 2.3 2.3 2.3 B 115 170 204 208 L 40 53 70 70 H 22 23 26 25 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 G 27 40 54 54 P 57 73 73 E 18 16 17 14 F 30 41 50 50 D 40 53 70 70 A 40 53 70

Mist Separator Series AFM20/30/40

.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 10 One-touch fitting O S 1/4 Width across flats 17 (mm) With bracket Accessory specifications Port size Standard specifications With auto-drain Model L 40 53 70 70 M 2.3 2.3 2.3 2.3 B 115 170 204 208 K 8.4 8 10.5 10.5 G 27 40 54 54 H 22 23 26 25 J 5.4 6.5 8.5 8.5 F 30 41 50 50 D 40 53 70 70 P 57 73 73 E 18 16 17 14 C 10 14 18

2/3 Port Valve for Various

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

C85

cushion only) With rod boot CP95 Wh KK NCM C NCA e DKA K -X 9 Rod cross section 9 I f AM 20h (mm) Data KK BE EE N2 KW NA SW S KA KV ZZ Z G1 HR K XC RR G2 WA Bore C AM CD H9 D EW F WB H N1 U WH ND h8 4H9 8 M12 x 1.25 M5 x 0.8 M4 x 0.7 15 4.2 46 19 86 6 76 64 7 10 12 28 16 4 8 10 6 7 5 11.5 9.5 12 12 16.7 7 (5.5) 8 (5.5) 8 (5.5) 5 (5.5) 11.5 (13.5) 12.5 (12.5) 12.5 (12.5) 9.5 (13.5) 46 (53

Compact Cylinder Series CQS

48 57 66 74 83 92 315 273 129 146 188 231 121 137 20 632 567 93 503 106 119 132 144 157 439 182 208 311 375 170 195 25 800 958 721 643 150 166 182 197 213 564 134 245 277 406 485 1116 229 261 Additional Mass (g) Bore size (mm) 12 16 20 25 1.5 3 6 12 Male thread Nut Rod end male thread 1 2 4 8 Rubber bumper (No need to add for long stroke) 0 1 2 3 Foot style (Including mounting bolt) 55 (53

Electric Actuator

effective depth MR 10 to 39 17 23.5 XA H9 depth XA 40 16 35.5 23 40 to 100 32 31 10.5 15 101 to 300 62 46 60 15 to 39 24 32 MH 50 40 to 100 42 41 25 46 29 101 to 124 14.5 20 75 125 to 200 59 49.5 MD Section XX 201 to 400 76 58 MC 20 to 39 22 36 50 L MA ML + Stroke (MB) 40 to 100 36 43 32 55 30 101 to 124 18.5 25 Body bottom tapped/In-line motor/LEY Dl -lllU 16 25 32 A B C 80 125 to 200 53

0.55

120.2 115.1 X X X X (Indicator light) [ ]: Without indicator light Unless otherwise indicated, dimensions are the same as Grommet (G). 13 Series VP300/500/700 Pilot Poppet Type Base Mounted/Single Unit Series VP700/Base Mounted/Dimensions Grommet (G) 40 3/8, 1/2 2(A) port 16 72.5 24 67 18 2 x 6.2 (For mounting) 3/8, 1/2 3(R) port Grommet (G) DC without light/surge voltage suppressor NO 2A 53

Air Slide Table Series MXS

For details, refer to Model Selection on pages 52 and 53. When actuator is used outside of operating limits, eccentric loads on guide will be in excess of this causing vibration on guide, inaccuracy, and shortened life. 2. If intermediate stops by external stopper is done, avoid ejection. If lurching occurs, damage can result.

17

MGPM, MGPL, MGPA Common Dimensions (mm) P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL Nil TN TF 42 46 53 53.5 G1/8 G1/8 29 33 37 37.5 6 8 10 10 7 7 8 9 6 6 8 7 26 30 36 42 10 10.5 11.5 11.5 7 7.5 9 10 58 64 83 93 12 16 20 25 M4 M4 M5 M5 13 15 18 21 13 15 18 21 18 22 24 30 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 10 12 13 15 M4 x 0.7 M5 x 0.8 M5 x 0.8

NCM

Blue 14 14 0.5 Lead wire length (m) 53 53 3 D-C80C 83 83 5 Contact protection box OUT () Brown Dimensions Reed switch Unit: mm CD-P11 30 OUT ( ) Blue CD-P12 9 6.7 10 6.5 Note) In a case where the operation load is an inductive load. In a case where the wiring load is greater than 5 m. Use the contact protection box in any of the above listed situations.

OMR0032

Operation . 53 11.1 Return to origin position . 53 11.2 Positioning operation . 55 11.3.

ZQ-OM01301

50 43 41 79 76 4 0.1 17 15 12 23 0.2 28 25 21 39 0.3 42 33 37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Padlock mounting position (Port size) (Port size) Standard specifications Model P1 P2 A B C D E F G H VHS20 1/8, 1/4 1/8 71.5 23 40 37 28 42 17.5 40 VHS30 1/4, 3/8 1/4 87 32 53 49 38 53 20 53 VHS40 1/4, 3/8, 1/2 3/8 111 42.3 70 63 52 71 29 70 1 0 - Revision history Rev. A Safety Instructions (Piping) corrected.

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.