High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Lightweight and Compact

20 s Max.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

voltage suppressor (Non-polar type) 3 position pressure center For AC voltage valves there is no S option.

Slider Type/Ball Bushing Bearing

J A N PS W PP Z + Stroke Square nut insertion Square nut insertion TW NL (mm) PA 65 66 Model A 125 132.5 CY1HT25 CY1HT32 EB 79 90 H 63 75 HA 46 52.5 HB 46 57.5 HC 61.5 72.5 HG 19.5 25 HP 58.5 69.5 HT 35 43 J M6 x 1.0 M8 x 1.25 LL 56 63.5 LW 119 130 M M6 x 1.0 M8 x 1.25 MM 10 12 N 20.5 23 NL 18 22.5 NT 9 12 EA 28.5 30 Model PB 108 115 CY1HT25 CY1HT32 PS 51 61 S 209 219 TW 110 124 W 136 150

Transfer

A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

LEY-OM007

40[%] INPON 2[mm] j 1[mm] j AREA ON OFF ON INP OFF 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 -26- 3 INC a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 ABS()/ / INC()/ / 1 30[mm] No.0 No.0INC 10 (INC) c 50[mm] 0 10 20 30 40 50 [mm] 2 30[mm] No.1 No.1INC

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-

10

N S SJ SN 2 pcs. 3 pcs.

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

39

L M N O P Q J K L M N O P Q Part no.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Stopper Cylinder

transfer direction 2 x P (Rc, NPT, G) F Z X Stroke S T 0 0.1 D Q M E J G A + 2 stroke B + Stroke H + Stroke V L E M 4 x N through 8 x O counterbore Width across flats K T 0 0.1 Workpiece transfer direction 2 x P (Rc, NPT, G) F Z X Stroke S D Q M E J A + 2 stroke B + Stroke H + Stroke V L G E M 4 x N through 8 x O counterbore T 0 0.1 D Mounting: Both ends tapped RSQA [mm] A + 2 stroke B +

RZQ

(Example) Bolt M5 x 110l (Two bolts are necessary per cylinder) RS Q G RS H A RZQ Rod side mounting Head side mounting MI W S CEP1 CE1 CH CR CE2 Attached B-type washer D D ML2B C J G5-S CV MVGQ C 50, 63 CC Note) Use the attached washer when inserting the bolt from the rod side.

Cylinder with Lock

Specific Product Precautions 8 Cylinder with Lock Double Acting, Single Rod/Double Rod 32, 40, 50, 63, 80, 100 CP96N Series RoHS How to Order CP96N B 32 100 C J W CP96ND M9BW S W B 32 C 100 J With auto switch With auto switch (Built-in magnet) Bore size 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm Made to order Refer to page 10 for details.

VQ7-6/7-8

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

15

[mm/s] (Operating condition) a1: Acceleration [mm/s2] T1 = V/a1 [s] T3 = V/a2 [s] = = 0.57 [s] T2: Constant speed time can be found from the following equation.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,