3 Port Solenoid Valve Metal Seal Series VZ200 1

4 88 116 5 107 135 6 126 154 7 145 173 8 164 192 9 183 211 10 202 230 Symbol L1 L2 4-15-17 18 Series VZ200/400 Precaution 1 Be sure to read before handling.

AC Servo Motor Driver (SSCNET Type)

5 2.86 20 10 5 Parameter *1,*2 Para.

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

For valve weight, refer to page 2-3-10.

IDX-OM-O004C

( ) 10.2 1.6MPaADH4000-04 IDF15E1-10-L IDF15E1-20-L N.O. () ) 0.051.6MPa 400cc/min (0.7MPa ) ) 50L/min(ANR) 10 1 10.L 10.3 Rc1/2 32 25 1) 2830Nm 30 (5) (22)(27) () () () 2) 10.4 10 2 11.M M 11 11.1 ( ) 11.2 ADM200 IDF15E1-10-M IDF15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W 11 1 11.M 11.3 Rc1/2 32 25 1) 2830Nm 30 (5)

7

knuckle joint Press-fit spring pin 3 x 22 L 10 +0.022 H8 0 13 Press-fit spring pin 3 x 22 L Shaft: 10 Hole: 10 13 0.040 d9 0.076 +0.022 H8 0 24 24 C7 C7 30 +0.5 +0.2 12 0.1 0.3 12 41.2 26 24 18 36 36 D48 48 Please contact SMC for details of the CKGA32 series.

Clamp Cylinder with Lock Series CLK1

Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 6 Hole: 10H8 102 + Stroke 55 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 R12 Width across flats 36 Shaft: 10d9 0.040 0.076

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

Compact Cylinder with Air Cushion Series RQ

L d m t D d H B C C type 8 for shaft C type 10 for shaft C type 10 for shaft C type 14 for shaft 21 25.6 41.6 50.6 7.6 9.6 9.6 13.4 16.2 20.2 36.2 44.2 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 20 25 32, 40 50 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 5 6 8 11 13 17 22 27 15.0 19.6 25.4 31.2 IY-G02 IY-G03 IY-G04 IY-G05 NT-02 NT-03 NT-04 NT-05 8 10 10 14 0.040 0.076 0.040 0.076 0.040 0.076 0.050

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- AF-A Air Filter

Note 8) : For pipe thread type: NPT only 1069 A Air Filter 1021-AF-A Standard Specifications Model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 1 10-/21-AF60-A 10-/21-AF40-06-A 10-/21-AF50-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa 5 to 60C (No freezing) Ambient & fluid temperature 5 m Nominal filtration rating 1600

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.

Refrigerated Air Dryer

GD Breaker Capacity and Sensitivity Current Sensitivity current IDFB4E to 37E IDFB55E, 75E Model Breaker capacity 10 A 30 mA Maximum operating pressure: 240 psi (1.6 MPa) 10 A 30 mA Replacement Parts Configuration Replacement part no.

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Process Valve

: E) In the case of EZ or TZ, the length is longer by 10 mm.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.