Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output
AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868
Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: BDG (B+D+G), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 03 (3/8), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 03 (3/8), Options: EH (E+H), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 03 (3/8), Options: M (Round Type Pressure Gauge, w/Color Zone), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure
Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: DH (D+H), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 03 (3/8), Options: H (w/Set Nut; for Panel Mount), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Options: C (N.C., Normally Closed), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Backflow Function: None, Thread: G, Port: 1/4, Option: E3 + H, Semi-Standard 1: Standard, Semi-Standard 2: Standard, Made to Order: -
Body Size: 30, Backflow Function: None, Thread: Rc, Port: 3/8, Option: E3 + H, Semi-Standard 1: Standard, Semi-Standard 2: Standard, Made to Order: -
Body Size: 30, Backflow Function: None, Thread: G, Port: 1/4, Option: B + D + E3, Semi-Standard 1: Standard, Semi-Standard 2: Standard, Made to Order: -
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Options: CH (C+H), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 02 (1/4), Options: DH (D+H), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: F (G), Port Size: 03 (3/8), Options: DE4 (D+E4), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: DE (D+E), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 03 (3/8), Options: BCE (B+C+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa
Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: E4 (PNP Output, Wiring Top Entry), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge
Body Size: 30, Back Flow: w/o Backflow, Thread: Rc, Port Size: 03 (3/8), Options: E4 (PNP Output, Wiring Top Entry), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge