Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Table of Contents

7 No. q w e r t y u i o !

1

MY1M(W) MB 8 Mechanically jointed rodless cylinder MY1 Cam follower guide type With cover (W) is also available.

Sine Rodless Cylinder Series REBR Direct Mount Type

First tentative bore size determination W D 1.6 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation (Refer to page 75 for vertical operation.)

RSQ

1 w o @0 !7 i !9 !

SMC Pneumatic Clean Series

With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.

Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Table of Contents - Tubing

Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.

RZQ

x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

RLQ

Retraction locking: B Extension locking: F CL W CL1 B A MLGC Emergency stop Drop prevention A W B CNG W MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA W CNS W CLS CLQ MLGP W RLQ W MLU ML1C W DPreparing for Operation Warning 1.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

CLQ

Component Parts No. q w e r t No. !7 !8 !

Auto switch mounting grooves have replaced the CQ2s mounting rails, preventing projection of auto switches and improving ease and safety of work.Double acting, single rod, compact cylinder, Bore sizes *: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, Standard stroke range *: 5 to 100, Port threads: M *; Rc, NPT or G *, Auto switch capable, CYL, COMPACT W/SCRAPER, ACTUATOR, CQ2-Z COMPACT CYLINDER

Compact Cylinder Series NCQ8

M2 bolt circle M1 W I dia.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Compact Cylinder with Lock Series CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

Compact Cylinder with Air Cushion and Lock Series RLQ

TH Rear cylinder Port TP w e r t q u i y w e r t q u i y Approx. Max. T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

3 Position Cylinder Series RZQ

x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

SMC Pneumatic Clean Series

V U Q R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.