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of arm section) L1 = 50 [mm] L2 = 40 [mm] a m L2 Item Load factor n Note zLoad mass 1 = m/mmax = 0.5/5 = 0.1 Investigate m.

pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

20 2.5 0.95 25 3 2.25 0.2mm 0.2mm 14 - 3-4. 1025 (1)Assy (2) (3) (4) (5)Assy O Assy :GR-S-010(10g) O C 15 - 32,40 1C 2 3 4.Assy :GR-S-010(10g) C 32 3 40 4 32 2 40 2.5 Assy 16 - 3-5./ 1025 / / / / 1 12 13 2 10,16; 20;25; 14 20,25; 3 15 C 4 5 16 A 6 17 A 18 NO 7 19 NC 8 20 NBR 9 21 NBR 10 22 NBR 11 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-D MHZ2-C MHZ10-PS MHZ16-PS MHZ20

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5

(Including insulating material) 1.5 mm 1.27 mm 1.65 mm 1.27 mm Rated current 3 A 4 A 3.1 A 4 A Rated voltage 125 V 60 V 125 V 60 V Contact resistance 40 mW or less 5 mW or less 40 mW or less 5 mW or less Insulation resistance 1000 MW or more 100 MW or more 1000 MW or more 100 MW or more Withstand voltage 1.5 kV 1.0 kV 1.5 kV 1.0 kV Rating/Performance Ambient temperature Connector 25 to +60C

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm 40: 37mm 2 auto

23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

(For details, refer Best Pneumatics Vol. 1.) 5-2-4 3 5 Port Air Operated Valve Series SYA3000/5000/7000 Flow Characteristics/Weight Model/Series SYA320 (Body ported) Port size Flow characteristics Weight (g) Pilot port size (Nominal size) Valve model Type of actuation C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position

Please contact SMC regarding the connection thread NPT and pressure gauge supply for Both MPa and psi unit specifications. 1076 A 1021-AR-B Regulator Dimensions AR20-B to 40-06-B 10212 x P1 (Port size) Pressure gauge (Option) A BB C B Q V AA H K IN OUT R Applicable tubing 6/4 P2 (Pressure gauge port size) F J D U Bracket (Option) T N S M J Panel fitting dimension Y W IN OUT Z Plate thickness

A 2 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, 8 A DC24 V +10/-5%, 4 A 2 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].

Note 5) Please contact SMC regarding the set nuts for AR50 and AR60. 15-7-9 03 BE 30 1N AW F Option specifications Filter regulator Applicable models AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide 1/4 Non-relieving Flow direction: Right Left Drain

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

OUT2 NC Sensor 8 Load 41.8 4 40.3 OUT1 40 4.3 Black Main circuit 7 3 Load Brown 6 2 + SMC FLOW SWITCH Blue 5 1 35.8 36 12 to 24 VDC Series PF2W5 A 40 UNIT RESET PF2W30-A SET Panel fitting dimension 3 x 7.2 (= 21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 Main circuit 7 3 Load +0.5 0 Brown 19.4 6 2 + Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2W5 PF2W31-A View A The applicable

K J E Size variations Standard strokes Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting type auto switch C(D)U25 C(D)U32 Features 2 Free-Mounting Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A F9BW With auto switch CDU Without auto switch Number of auto switches With auto switch (built-in magnet) 2 pcs. Nil S 1 pc.