Process Pump

7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

CXT

G HT U (NA) (Option) A L HN(MAX.)

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

As a result, it will not be possible to verify it with the vacuum switch. In such a case, it is necessary to use an ejector that is suited to the nozzle and to select a vacuum switch with a favorable hysteresis and precision. 3.

VQ5000

-1/2 Ports P, A, B, R1, R2 0 1 G H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A

Mechanically Jointed Rodless Cylinder Series MY1

X Z Y m x g x X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

PSxx-OMV0003CN

()HNBR 153 g 152 g 150 g M12 139 g -83No.PS-OMV0003CN-G 2Xm4 5 -84No.PS-OMV0003CN-G A B -85No.PS-OMV0003CN-G M12 ZS-31-B ZS-31-C AWG23 0.72 mm 1.14 mm 4 5 m -86No.PS-OMV0003CN-G Revision history A [2017 9 ] B [2018 1 ] C [2018 2 ] D [2018 3 ] E [2018 6 ] F [2020 3 ] G [2022 1 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https:

Antistatic One-touch Fittings Series KA

(mm) Effective orifice(mm 2) Weight (g) H (Hex.) L2 A D1 M L1 D2 Part No.

HRX-OM-S004

/Japanese 1pc.), Accessory Y strainer (40 mesh) 20 A 1pc., Barrel nipple 20 A 1pc. Drain pan for the pump 1pc.

CNA

8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A5/A6 D-A59W D-B5/B64 D-B59W Hs Hs Auto switch Auto switch Ht 24.5 Ht 15 A 33 B A 33 B D-A3 D-G39/K39 D-A3C D-G39C/K39C G 1/2 (Applicable cable O.D. 6.8 to 9.6) Auto switch G 1/2 HW A 49 B (Applicable cable O.D. 6.8 to 9.6) Hs 49 Hs

CNA

8 9-7-21 22 Series CNA Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A5/A6 D-A59W D-B5/B64 D-B59W Hs Hs Auto switch Auto switch Ht 24.5 Ht 15 A 33 B A 33 B D-A3 D-G39/K39 D-A3C D-G39C/K39C G 1/2 (Applicable cable O.D. 6.8 to 9.6) Auto switch G 1/2 HW A 49 B (Applicable cable O.D. 6.8 to 9.6) Hs Courtesy

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GTa disassemble, hold the spanner flats of the tube COver in a vice 40 20 9,43 37,7 47.2 56,6 IN 28,3 and by holding the rod cover spanner flats with a spanner, 98,2 OUT 19,63 58,9 78.5 117.8 20 SEt IN 16,49 49,5 66.0 82.5 99.0 unscrew anti-clockwise to remove the cover.

Clean Regulator

316L) Grade B Fluororubber Grade A SRP PTFE Diaphragm material Weight 360 g 730 g 360 g 730 g Grade B Fluororubber Weight SRF 360 g 730 g 360 g 730 g ITV Dimensions Symbol Aluminum Body 5 X234 IC Dimensions other than below are the same as the standard type.

MLGP

When using as a stopper, select a model with 30 stroke or less for bore sizes 20 and 25, and 50 stroke or less for bore sizes 32 to 100. 2. When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large.

MLGP

7 N@4 CL1 A' A A' A MLGC CNG B MNB @5 !5 CNA CNS 20, 25: 50 stroke or less Over 100 stroke CLS CLQ Extension locking (Type F) Retraction locking (Type B) MLGP N#2 u #6 y @2 u #6 #2 y #5 @2 i i RLQ MLU ML1C D-X Section B-B' Section B-B' 20Section A-A' !6 !6 Section A-A' Data Component Parts Description Material Note No. !7 !8 !

KA

Male run tee: KAY Effective area (mm2) Weight (g) Connection thread M thread Uni thread Tube O.D. (mm) H (Hex.) A D2 M L1 L2 D1 Part No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

MQQ

79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to

ITV

Then, a correct operation works until a vacuum pressure proportional to the input signal is reached, and a vacuum pressure is obtained which is always proportional to the input signal.