Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W (With Exhaust

, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: P (Manifold Common Release Pressure Supply Spec.), Exhaust Interference Prevention Valve: W (With Exhaust

, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: P (Manifold Common Release Pressure Supply Spec.), Exhaust Interference Prevention Valve: W (With Exhaust

ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: w/o Option, Exhaust Interference Prevention Valve: W

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Air Cooled Aftercooler Series HAA 1

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto-drain).

IR10-OM00007

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 0050. 2 M Pa M AD E I N J APAN So G No.

IR20-OM00008

d (4)[][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 ON-OFF 1 1 7 2 2 2 No.

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: S (Table Type), Body Size: 10, Motor Size: Basic, Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 50mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: Basic, Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 50mm

Protocol: E (EtherCAT®), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: S (Table Type), Body Size: 10, Motor Size: Basic, Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 50mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: S (Table Type), Body Size: 10, Motor Size: Basic, Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 50mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: L (Compact), Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 50mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: L (Compact), Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 25mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: S (Table Type), Body Size: 10, Motor Size: L (Compact), Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 25mm

Protocol: E (EtherCAT®), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: L (Compact), Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 50mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: S (Table Type), Body Size: 10, Motor Size: Basic, Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 25mm

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: S (Table Type), Body Size: 10, Motor Size: Basic, Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 25mm