e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

JXCx-OMT0061CN

SW Enable SW SW 12 Unit name W 1 W-AREA1 W 1 AREA ON (mm) W 12 AREA ON + *W 1>=W 2 ,PARA W 1=W 2=0 AREA OFF W 2 W-AREA2 W 2 + ORG Correct * Sensor type * 1 (CC-Link () 1 (CC-Link ) ) () Option 1 1 (1 ) 14 (Occupied number of stations of CC-Link) 2 (2 ) 4 (4 ) CC-Link (CRC ) 11 CC-Link 11 CC-Link CC-Link 0 () UndefineN o.11 0,10 (Operation setting at CC-Link communication

Micro Mechanical Valve Series VM1000

5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Direct Solenoid

T Optlonal Nvs 4 Ll 1 4Type of acluallon E = 44" Elecrrical L6ads M = hlerla@ speed conlrol P = Di. quS-inConnecior P1 = Din Top $lh light lnor ailable clas 2-5) P5 = Din w/6ll. prewned cord P6 = Oln Top w^ighi and 6 tt. prewned cord +Fl : sPF0101 Si.gle InlerlEe R9.

Return Filter FH100 Series

(Reset type) Perform element replacement when the red ring floats up and covers the entire view port. 0.1 08 10 12 20 24 16 0.05 Pressure drop (MPa) 0.03 w Operation The hydraulic fluid used becomes high viscosity when the temperature is low during the winter, etc., and the differential pressure indicator or the switch may activate.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Plate Cylinder with Lock Series MLU

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

AC Servo Motor Driver (SSCNET Type)

10 5 2.86 20 10 5 Parameter *1,*2 Para.

AC Servo Motor Driver (CC-Link Type)

power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

AR20-B to AR60-B

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

MHK2

30 30 60 0.3 MPa 0.4 MPa 40 0.5 MPa 0.6 MPa 20 20 40 0.6 MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Wedge Cam Operation Provides

20 40 0.6MPa 20 20 10 10 50 60 10 0 0 20 50 60 10 0 20 30 40 100 120 20 0 20 30 40 100 80 60 40 40 60 80 Holding point L (mm) Holding point L (mm) Holding point L (mm) Holding point L (mm) Note) Distance to the holding point L of single acting type is shortened end by spring return.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut t Insert bushing Place the insert bushing t on the insert pin assembly r. 2 !

-fl Seies

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

IC

Step 20 Step 5 P4 Set pressure P3 P2 The deviation is corrected manually (with keys).