3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Note) The -X126 model cannot be manufactured with an L plug connector for electrical entry. Therefore, use a grommet type or an M plug connector.

4-channel Flow Monitor ( compatible)

If the failure cannot be solved, contact SMC. 1 Displayed if an internal data error has occurred. System error 1 Not applicable 1 1 1: The switch output will be OFF when an error is generated.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

CH2-4 has one output each. 4 Multi-channel Digital Sensor Monitor PSE200A Series 3-Screen Display IO-Link is an open communication interface technology between the sensor/ actuator and the I/O terminal that is an international standard, IEC61131-9.

Clean Gas Filter

AT IDF IDU SFB 20 02 0 IDF FS Clean gas strainers made of an element (120 m, stainless steel 316 sintered metal) to protect regulators and vacuum regulators are also available.

Pulse Valve

(Effective for up to the number of set channels) Interrupting an operation via an external switch is possible using input signals.

VQ5000

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Low Differential Pressure Sensor

Never use in an atmosphere of explosive gases. The switches do not have an explosion proof rating. Never use in the pressure of an explosive gas as this may cause a serious explosion. Maintenance Warning Mounting 1. Perform a periodical inspections for proper operation of the switch. Unexpected malfunction or erroneous operation may lead to failure in ensuring safety. 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

S070 3 port (Option) 100 VAC 200 VAC 110 VAC 220 VAC M plug connector (M) 1.3 1.7 (A) 2 VQ M plug connector (M) VKF 1 (P) 3 (R) N.O. Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

The product does not have an explosion proof construction. Be sure to take measures to prevent the area around the product from becoming filled with an explosive gas, when using an explosive fluid. 56

RSH/RS1H

900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] =

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 1100 1100 0.5 RHC 1000 1000 0.4 900 900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

s m 2.

Vacuum Equipment

Equipment such as an ejector is configured as an individual unit. Thus, it is possible to create a flexible system configuration in which the circuit composition and the mounting locations can be selected as desired.

3

In the case of obtaining an accurate flow rate, refer to pages 227 and 228.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

-mGm-m VX VNl VQ Dotted line: Bracket mounting style (-F) 4.3-9 Series VQ20/30 Dimensions/Series VQ30 DIN connector (Y) VQ31A1-mYmm-m Dotted line: Bracket mounting style (-F) 4.3-10 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve How to Order Manifold VV2Q 2 2 08 How to Order Manifold Assembly List valve and option part numbers under the manifold base part number.

CU

Lead wire length (m) Load voltage Auto switch part no.

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53