MXU

Lateral Mounting (Body through-hole) MX MTS l1 Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 12.7 MY M4 x 0.7 2.5 15.6 M4 x 0.7 2.5 20.6 CY When tightening the work on the table with bolts, it should be done while holding the table. If holding the body, it may cause more than allowable moment to the guide, leading to decrease in accuracy.

3 Port Solenoid Valve/

Monitoring L Logical operation equipment L1 Logical operation equipment Input signal I Input equipment O Output equipment Input signal I1 Input equipment O1 Output equipment Output signal Output signal Monitoring Cross monitoring Monitoring L2 Logical operation equipment Input signal I2 Input equipment O2 Output equipment OTE Output of test result TE Testing equipment Output signal Output

P

Description Material 1 Body SCS14A (SUS 316) 2 Needle SUS316 L4 3 Lock nut SUS316 4 Valve SUS316 5 Valve guide SUS316, NBR for low temperature L2 L3 6 Spring SUS316 7 Bolt SUS316 8 O-ring NBR for low temperature L5 9 O-ring NBR for low temperature Model Port size D H L1 L2 L3 L4 Note) L5 Mass g MAX. MIN.

ITV

(mm) 10 9 8 7 6 5 4 3 2 Manifold stations n L1 L2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 14-8-10 11 Compact Electro-pneumatic Regulator Series ITV0 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Air Supply Handling Caution 1.

VVX31/32/33

L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

VFRA3000

EX) VV5FR4-10-l1-l VV5FR4-10-l2-l Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. EX) VV5FRA4-10-061-03 1 pc. VFRA4111 5 pcs.

Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch P = 16 Common SUP. port 2-M5 x 0.8 Individual SUP. port Common pilot EXH. port VAC port Silencer dedicated for manifold VAC. port electrical entry (In the case of side entry/With plug at the bottom) Rc 1/8 Hexagon socket head cap plug (mm) L1

ZMA

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31

ZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U

-- NCM seies

l 0.437 hf20 0.75 o.749 0.34 1.32 o.25 3.41 1.06 %-16 0.88 1.37 0.74 15O l1%) o.437 o.75 0.749 o.38 1.56 o.25 3.3A 1.25 3a-16 0.8a 1.25 0.62 5.12 @ Air Cvlinder Stain]esJ Steel Cylinder Series NCM Single Acting Spring Return /Spring Extend slrc' DITENSIONS NC BO-OS NCilCO-OS F 1.69 1.56 *o T'ICMBO.OT |-1 rr"" o*"-\H @ slrc' Air Cvlinder Stainles5 Steel Cylinder Series NCM Non-RotatinCRod

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8 lrg , L1 2.28 (58) 2.91 174) 3.54 (90) (06) 4.80 112.) 5.43 (38) 6.06 054) 6.69 (170) 086) t,n2) 8.58 (a8) 9.21 (234) 9.84 (250) 10.47 (266) 1110 1282) 11.73 (298) (3|4) 12.99 (330) 13.62 (346) L2 1.57 \40) 2.20 (561 2.43 (72) 3.,16 (88) 4.09 (ta) 4.72 0n) 036) 5.98 ,.152) 068) 7.24 (184) 7.87 8.50 (2oo) (26) 9.'13 1232) 9.76 \248) 10.39 l2u) 11.02 \2fi) 11.65 (296) 12.24 \312) 12.91 (328

Cooling Capacity: 2kW, Temperature Set Range: -20°C to 40°C, Option: -

Cooling Capacity: 1kW, Temperature Set Range: -20°C to 40°C, Option: -

Cooling Capacity: 4kW, Temperature Set Range: -20°C to 40°C, Option: -

Mounting Method: 1 (Gasket Mounting), Load Capacity: 0 (Standard), Port Size: For Gasket Mounting, Indicator Light: L1 (Neon Lamp/110VAC)

Mounting Method: Gasket Mounting, Load Capacity: Standard, Port Size: For Gasket Mounting, Indicator Light: Neon Lamp/110VAC, Pressure Display: -

Mounting Method: 1 (Gasket Mounting), Load Capacity: 1 (Micro Load Style), Port Size: For Gasket Mounting, Indicator Light: L1 (Neon Lamp/110VAC)

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled