Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

When operating 6 or more valve stations within a manifold at the same time, take SUP air pressure from both sides and open EXH port to the atmosphere. 2. When manifolding an exhaust center 3 position valve, use the individual EXH style manifold. (Back pressure may cause actuator to malfunction.) 3-9-5 6 Series VVS410 Construction Replacement Parts: Sub-assembly No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

130 178 209 268 3 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal Series XMC, XYC How to Order XMC XYC M9N A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Motor Operated Auto Drain ADM200 Series

How to Order 03 ADM200 1 Thread type Operating time/Applicable compressor Nil N F Rc NPT G Nil 2 sec/min (1 time/min) /3.7 to 37 kW 4 sec/min (2 times/min) /37 to 75 kW 6 sec/min (3 times/min) /75 to 110 kW 8 sec/min (4 times/min) /220 to 370 kW 4 6 8 Port size Voltage OUT IN Symbol 04 03 100 VAC Hz 1 3 8 3 8 50 60 200 VAC Hz 50 60 240 VAC Hz 50 60 110 VAC Hz 50 60 220 VAC Hz 50 60 24 VDC

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3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

80 or less 180 or less 180 or less 30 or less 60 or less 300 or less 180 or less 0.8 1.4 100 90 20 14 13.2 Response time (1) (ms) VFN Max. operating frequency (c.p.m.) (2) DC AC DC AC 1.6 2.4 300 360 50 60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.

Digital Gap Checker

for centralized lead wire ISA-20 Stations Model 2 ISA-21-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 Regulator AR20-02-1-B -12No.PS-OMT0002-E 2 About this product 2 port solenoid valve VX210X276 Bracket (when control unit fitted) (Nominal size:3 x 8, 2 screws) ISA-17 Spacer with bracket Y200T-A Modular adapter E210-U01 Spacer ISA-18 With O-ring : When a 2 port solenoid valve is connected

Air Pilot Operated Series NVSA

AxT 33$20 3 Spacer "A' End AXT 33310 Spooj E Sleeve Ass'y. 440 F-S.S. 5 O'Fino-S & S {6) Buna N AFtP 56&014 6 Gaskl Pilot Covers (2) Buna N AXT 334.7N-1 PILOT COVEFS "A,,END.B"Eftl0 Type "O" ' wlo Operetor w/{4) Scrows {a Alum. D.C. PC 0100-1 7B Type "N". Woperator & (4) Screws (a AlumD.C. PC 0101-1 Type "B" vo Operator w(4) Scfews (ea.) Alum.

Rotary One-touch Fittings Series KS/KX

Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h

High Power Cylinder:

1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

COQ2BP

L, ' N X NZ NX NZ L, P i A A 0ND. o oNDI1'o A, U, NX bJ AppI bore size A ., E, 11 MM 'R, U. -. . No. CQ2 Single Rod Clevis (mm) C02 Double Rod Clevis (mm) ;1 AppI bon ... A A, E, b MM -110 U, HDHa HX 50,63 56 ,. 028 0) Ml8x1.5 I. 20 ' 4 i 010 22 ~3 ~., Pan No. NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !

CY1F

3) Generally, the internal voltage drop will be greater with a 2-wire solid state auto switch than with a reed switch. Take the same precautions as in 1). Also, note that a 12VDC relay is not applicable. 3. Pay attention to the length of time that a switch is ON at an intermediate stroke position. 6. Pay attention to leakage current.

Sine Rodless Cylinder Series REA

When used without a guide for a light load. When space is very limited. Series REAS Size: 10, 15, 20, 25, 32, 40 Smooth operation is possible through the use of a special slide bearing. To ensure a permanent path. When used for general transporting. A load can be carried directly by the integrated guide type.

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4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (17.5) Hs A 5 (7.5) 5 (7.5) 5.5 (10.5) 7 (12) 7.5 (12.5) A 5 (7.5) 5 (7.5) 0 (4) 1 (6) 1.5 (6.5) A 2 (4.5) 2 (4.5) 2.5 (7.5) 4 (9) 4.5 (9.5) A Hs Hs Hs Hs Hs Hs CU 25 32 33 39 35.5 37.5 34.5 CQS 32 39 40 46 42.5 44.5 41.5 CQM 0.5 (5.5) 2 (7) 2.5 (7.5) 40 56.5 47 48 54 50.5 52.5 49.5 CQ2 50 Courtesy

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4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (17.5) Hs A 5 (7.5) 5 (7.5) 5.5 (10.5) 7 (12) 7.5 (12.5) A 5 (7.5) 5 (7.5) 0 (4) 1 (6) 1.5 (6.5) A 2 (4.5) 2 (4.5) 2.5 (7.5) 4 (9) 4.5 (9.5) A Hs Hs Hs Hs Hs Hs CU 25 32 33 39 35.5 37.5 34.5 CQS 32 39 40 46 42.5 44.5 41.5 CQM 0.5 (5.5) 2 (7) 2.5 (7.5) 40 56.5 47 48 54 50.5 52.5 49.5 CQ2 50 66 56 57

Sine Rodless Cylinder Series REBR Direct Mount Type

5 A B REBH25 6 5 REBHT25 6 5 REBHT32 9 6 Proper auto switch mounting position (mm) Note) Operating ranges are standards including hysteresis, and are not guaranteed.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

When installing a paddle on IF3O type, piping may be interfered with by the tip of a paddle. Because this is used to detect a small flow rate, and to narrow the distance between a paddle and piping, additional machining of the paddle tip may be necessary to eliminate interference between the two. 6. Use pipe fittings that comply with JIS specifications.

RZQ

Piston A Piston A C A A Piston B Piston B First-stage extension First-stage retraction Piston A Piston A B A C A C Piston B Piston B Second-stage extension Second-stage retraction 10-10-4 5 3 Position Cylinder Series RZQ Weight Weight Table Unit: kg Cylinder stroke Bore size (mm) 25-5 50-5 75-5 100-5 125-5 150-5 175-5 200-5 250-5 300-5 32 40 50 63 0.81 0.88 0.94 1.01 1.07 1.13 1.20 1.26 1.39

3 Position Cylinder Series RZQ

M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0

EX500-GPR1A.eng

Confirm that the connector portion does not move. 14.9 Gray: Ground Black: DC24V 10% ( power supply for input and control ) Blue: 0V ( for input and control ) White: DC24V+10%/-5% ( for solenoid valves/output ) 18 48 34 Straight connector Type Angle connector Type EX500-AP -S EX500-AP -A 6 30 5 50 31.3 28.3 6 Socket Connector Pin Layout 4 3 1 5 30 5 50 2 B. Single power supply system A.