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'A B C J O E F H:MSxna !H:M6xl ! Y ~..Rat type Rat wfIh rib Deep type Bellows type G I G Flat R a1wi1h.ri!> M. M5 Modol ~ M6 M8 M5 1M6 M8 M5 M6 M8 M4 IM5 M6 M8 ZPR10g 10 12 12 21 29.9 46 5 6 3 1.7 19 20 i''i: '')I {''::''j ,"i'i 1,;,,1 I 19 1 :P>~2 ZPRIl8 , 20 ZF!

SYJ300/500/700

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52 Type SS3YJ5-20 Body ported for internal pilot M5 x 0.8 0.47 0.71 0.98 0.71

4 Port Solenoid Valve Series VQD1000

(Initial value) 3 1 (R) (P) Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Flow characteristics Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Valve model Body ported 10-VQD1121-L M-M5 10-VQD1121 -L M-M5 10-VQD1151-L M-M5 10-VQD1151W-L M-M5 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.05 0.07 0.06 0.07 Base mounted (With sub-plate

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 ZSM A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common Dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 14.4 10 3.4 01: R1/8 N01: NPT1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 833 Low Differential Pressure Sensor Series PSE550 Series Rated pressure

SYJA3000

port) (Piping port) 21.5 R1 P 8.5 6 6 R2 15 1.8 (Bleed port) With filter (80 Mesh) 217 17 21 45.5 24 32 3 position closed center/exhaust center/pressure center: SYJA5 20-M5 3 position closed center/exhaust center/pressure center: SYJA5 40-01 3 4 5 3 4 5 28 2-M5 X 0.8 4.3 22-M5 X 0.8 37.5 23 (Pilot port) (Mounting holes) (Pilot port) (Mounting holes pitch) A B 1 A B 11 5 3 1 24 A B 1 1 R

Hygienic Design Cylinder Series HY

Note 3) For piping, refer to Specific Product Precautions. 882 Hygienic Design Cylinder Series HY Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height HYB D-H7BA 16 16 SMC SMC SMC SMC Hs B 29 A B Hs 29 A 20, 25 32 to 63 D-G5BA 24.5 A 33 B Hs 80, 100 (mm) D-H7BA D-G5BA A Bore size B Hs A B Hs 20 25 32 40 50 63 80 100 29 29 30 34.5 42 42 19.5 19.5 20.5 22.5

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

REA/REB

M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 105 RB REBR32 M8 x 1.25 x 10 13 76 7 7 M6 x 1 8.5 Rc 1/8 54 26 33 28 50 27 116 J X Y Z Model REBR15 18 54.5 98 DREBR25 28 72 125 REBR32 35 79 148 -X 20Data 10-2-71 71 Series REBR Proper Auto Switch Mounting Position (Detection at Stroke End) A B C D 15

REA/REB

8 Stainless steel Wear ring B Special resin Cylinder tube w !

24

[mm] MGPM, MGPL Common Dimensions Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 16 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 7 6 30 10.5 7.5 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 20 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 78 62 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

5 Port Solenoid Valve, Series VQC

A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 (mm) Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

5 Port Air Operated Valve SYA3000/5000/7000 Series

SYA714002 03 57 77.5 42 10.4 61 M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 69 6.4 2 x 4.3 (For mounting) 87.5 1.8 (Ventilation hole) 26.5 13.5 20.5 20.5 3/8, 1/4 (P , EA, EB port) 33 3/8, 1/4 (A, B port) 21 22.5 2 position double SYA724002 03 11.5 13.5 57 5.1 71.1 42 61 4 2 x M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 15.1 69 2 x 4.3 (For mounting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CG1N20-PS CG1N25-PS CG1N32-PS CG1N40-PS CG1N50-PS CG1N63-PS CG1N80-PS CG1N100-PS Contents C85 Rod cover Tube cover Piston Piston rod Bushing Bumper A Bumper B Snap ring Wear ring Rod end nut Piston gasket Cushion ring A Cushion ring B Seal retainer Cushion valve Valve retainer Lock nut Cushion seal A Cushion seal B Cushion ring gasket A Cushion ring gasket B Head cover Cylinder tube Rod seal

0.

Port size [2(A) port] C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) Body type Manual override Nil B Non-locking push type Locking type (Tool required) Function Note) For inch size one-touch fittings, refer to page 15.

Air Slide Table

Retraction stroke end E E1 H H G B F (C) A E E1 H H G B MXQR-BT8 MXQR-JT8 A F Stroke adjustment range (mm) A B C F G H J K 1) E E1 Applicable size Model MXQR 6 M2.5 x 9 M6 x 0.75 1 4 8 6 28.5 8.5 19 18 12 MXQR-BT6 1.4 MXQR-BT8 MXQR 8 M3 x 11 M8 x 1 5 12 40.8 8 10 24.5 24 20 7 MXQR-JT8 1.4 6 MXQR-BT12 MXQR12 M4 x 14 M8 x 1 12 40.8 10 14 29 28 18 7 5 MXQR-JT12 1.4 7 46.7 MXQR-BT16 MXQR16 M5

SYA3000/5000/7000

) Manual override (Non-locking) 1.3 (Ventilation hole) M5 x 0.8 (P , EA, EB port) 2 x 1.5 die-cast hole (For manifold gasket positioning) SYA3120-M5 M5 x 0.8 (A, B port) 1732 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported 2 position double SYA3220(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/

5 Port Air Operated Valve

Bracket (for VFA1000 double) DXT144-8-1A (With 2 mounting screws) 1501 VFA1000/3000/5000 Series Dimensions: VFA1000 Series/Body Ported 2 position single VFA1120-M5(-F)(-P) 2 position double VFA1220-M5(-F)(-P) (11.7) (11.7) (Distance between ports) (Distance between ports) 38 M5 x 0.8 [4 (A), 2 (B) port] M5 x 0.8 [4 (A), 2 (B) port] 26.4 (4) 6 14.8 5 B 2 B 2 26.4 10 10 1/8 (Pilot port: Upward