Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X205 100 IZN10-G-200-X205 200 IZN10-G-300-X205 300 IZN10-G-400-X205 400 IZN10-G-500-X205 500 IZN10-G-600-X205 600 Supply pressure specifications: 0.05 to 0.15 MPa If the tubing is bent for use, maintain a minimum bending radius of 20 mm.

1

connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

83 106 129 EB 30 32 38 50 57 66 77 EC 5.8 5.8 6.5 8.5 10 14 14 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 F 4 4 6 6 6 6 6 T 6 6 7 12 12 15 15 EA 7 10 12 14 17 20 26 W 58 58 70 88 104 128 152 Shock absorber unit model RB0806 RB0806 RB1007 RB1412 RB1412 RB2015 RB2015 8 Series MY1W Side Supports Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B J M4

Booster Regulator Series VBA1110 to 4200 1

G H AV OUT port AU AF 4-12 mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15

CXT

CV/MVG Y Z CXW 2-Rc(PT)1/8 CXS CXT G G 2-RB2015 (Option) 2 HT F MX A L HN (MAX.)

Multistage Ejector (N)ZL Series

Supply valve/Release valve combination Vacuum pressure sensor With supply and release valves With supply valve K1 K2 None Vacuum adapter Rc1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B With digital vacuum pressure switch ZSE4E Nil GN G E EB EE Rated voltage DC specifications 5 6 V S R 24VDC 12VDC 6VDC 5VDC 3VDC Manual override

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Compact Cylinder

2 y q e !3 o !0 With auto switch (Built-in magnet) 32 to 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 r t i !4 y q e !3 o w u !0 !1 M: Rod end male thread Component Parts Replacement Parts: Seal Kit No. Description Material Note Bore size (mm) Kit no.

Miniature Tubing & Miniature Fittings Series TU/M

steel J D I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g B C D E M A Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 Parts list 4 3 2 1 E Material Brass Brass NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel

CE2

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

H 2 position double: VQ525 3 position closed center: VQ535 3 position exhaust center: VQ545 3 position pressure center: VQ555 3 position double check: VQ565 0 1 0 1 0 1 0 1 G H G H G H G H 194.5 (200) 121.3 53 73.2 (78.7) Indicator light 213 121.3 91.5 13.5 (Port B) 59.5 53 (Port A)17.5 13.5 (Port B) 59.5 (Port A) 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18

60

92 g 127 g 156 g 247 g 301 g 293 g 349 g 532 g 630 g Weight JIS Symbol (1 g = 0.035 oz) 2 Flow-rate characteristics Port size Flow-rate characteristics INlOUT OUTlEXH Model IN, OUT EXH 3 1 C(dm3/sbar) b Cv C(dm3/sbar) b Cv 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 3/4 2.4 3.3 6.4 8.3 7.3 10.9 14.2 18.3 23.8 31.9 0.43 0.40 0.45 0.41 0.49 0.45 0.39 0.31 0.41 0.33 0.65 0.88 1.7 2.3 2.0 3.0 3.8 5.0 6.4

JXCx-OMT0001CN

<> <> ON(SVON ON) Unable to find motor phase in set time. (1-193) E <> ON SVON ON <> Output current limit exceeded E <> set value (1-194) <> Current sensor abnormality has occurred. (1-195) E <> <> Position error overflowed (1-196) E <> <> EEPROM Memory abnormality has occurred (1-197) E <> EEPROM 10 <> CPU CPU CPU error (1-198) E <> -93No.JXC-OMT0001CN-C 14. / A () 50mm

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

SYJ72R is only for manifold use. 35 Series SYJ700 Construction c f a e b d N.C. N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No.

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: 01 (R1/8 Piping Adapter, Side Ported), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover]

Piping: ø1/4" One-touch Fitting, Staight Type, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: ø4, ø5/32" One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: ø6 One-touch Fitting, Elbow Type, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -

Piping: R 1/8, w/M5 Female, Output: PNP Open Collector 1 Output+Analog Voltage Output, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: -, Operating Manual/Certificate: -, Made to Order: -