AC Servo Motor Driver (CC-Link Type)

Please refer to chapter 4 of the LECSC2-T Operation Manual and chapter 3 of the LECSC2-T Operation Manual (Simplified Edition) for details. When setup software (MR Configurator2TM) is used, the LECSC2-T model selection is required. Select 'MR-J3-T' through Model" "New" and "Project". -7- 1.

A

P-80 (N)

VNC

K L M N P Q R S T Model VNC2-10A VNC2-15A VNC3-20A VNC4-25A 3 8 1 2 3 4 1 63 63 80 90 42 42 50 60 28 28 35 40 14 14 17.5 20 72.5 72.5 84 100 80.5 80.5 92 108 87 87 92 93 180.5 180.5 192 208 148 148 159.5 175.5 52 52 62 72 26 26 31 36 4.5 4.5 5.5 6.5 24.3 24.3 28.3 33.3 2.3 2.3 2.3 2.3 25 25 30 35 34 34 43 49 55 55 60.5 73 LVA LVH LVD Threaded Type Port size: 32A, 40A, 50A LVQ Electrical entry

ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. 5 6 P EXH V V V PE Circuit ZQ11U-K1D F DK Type J1 ZQ11U-J1With L type plug connector Suction filter Vacuum pressure switch Supply valve Bracket A (standard) Pilot exhaust port (PE port) Note 4) 2-3.2 through Body mounting hole Note 2) S R U N L H L H k P a MODE SE T H YS Air supply port (P port) Note 4) (M3 x 0.5

Series KV2 Fittings

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

VNH

1(P) 12(P1) Nozzle 2(A) 3(B) port (Coolant liquid EXH port) 3(B) Plug Tank Coolant Pump 2 port valve application (Not applicable for 7.0 MPa model) 17-4-31 2 Series VNH How to Order VNH 15A 2 1 1 A 1 T Note) Silencer is provided as standard on pilot EXH port (P2).

AMPSeries

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting

This is a legacy product, and replaced byZSE20A-Y-01-J, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .32388 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

PSxx-OME0003CN

MPa 0-101 kPa 0101 kPa -101101 kPa -0.10 MPa 10.10 kPa -10.10 kPa 1.5 MPa 500 kPa DC1224 V10%(p-p)10%() 15 mA () DC15 V() DC0.61 V() 1 k (25 ) 2%F.S.(),5%F.S.() 1%F.S. 1%F.S.

This is a legacy product, and replaced byZSE20A-V-01-J, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, 1.48443 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

This is a legacy product, and replaced byZSE20AF-V-01-J-X531, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .34539 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

AC Servo Motor Driver (Pulse input type/Positioning type)

MD0 Automatic/manual selection 10 - (3) Output signal Position control mode: P, Speed control mode: S, Torque control mode: T, Point table method: CP, Program method: CL : Initial setting, : Assignment is available with parameter,: Assignment is not available Symbol Device name P S T CP/ CL Function ALM Trouble This signal turns off while alarm is generated.

Soft Start-up Valve AV2000/3000/4000/5000 1

gauge G36-10-01 1 MPa Description Part no.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Description Material Note q Zinc alloy Body A w Brass Handle Electroless nickel plated e Brass Body B Electroless nickel plated r Brass Needle Electroless nickel plated t Brass Needle guide Electroless nickel plated y Brass Seat ring (1) Electroless nickel plated(3) u Brass(2) Lock nut i U seal NBR o O-ring NBR !0 O-ring NBR !1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !

MHY2/MHW2

Refer to p.2.8-4 and 2.8-5 for the details of effective holding force and allowable overhanging distance. MHR MHK MHS MHC2 MHT2 MHY2 MHW2 MRHQ Auto switch 2.8-9 Series MHY2 Construction Closed 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !

Compact Vacuum Ejector Series ZQ

Please refer to the catalogue to confirm the sizes of the fittings to be used. 5 6 P EXH V V V PE Circuit ZQ11U-K1D F DK J1 type ZQ11U-J1With L type plug connector Suction filter Vacuum pressure switch Supply valve Bracket A (standard) Pilot exhaust port (PE port) Note 4) 2-3.2 through Body mounting hole Note 2) S R U N L H L H k P a MODE SE T H YS Air supply port (P port) Note 4) (M3 x 0.5

IDX-OM-W017

PTC OLR MC PE CM PE CM PE FM1 PRS PE FM1 P PRS FM2 PE P MC TDR FM2 PE FM2 DFA6E/8E MC TDR IDFA6E/8E FM2 IDFA15E1-23-T Operation Failure L N PE 1 3 2 TB TDR MC ILS CM FM1,2 OLR PRS MC TDR ILS PTC MC OLR PTC PTC PE MC CM C01 TDR MC TB C02 C11 FM C11 PRS RY P GFCI TDR MC EDV 12-5 IDFA Series 12 3 IDX-OM-W017 13 V 13 V V 12-2 13-1 1. 1 2 2. 3.

S Couplers

Plug: Without check valve Socket: Without check valve KKA4S-02M-1 KKA4P-02M-1 40.2 KKA KKA KKA6S-04M-1 KKA6P-04M-1 76.0 KP How to Order LQ KKA 4 P M 02 MQR Built-in check valve Body size With check valve Nil -1 Socket/Plug designation 1/8 1/4 1/2 3/4 1 1 1/4 3 4 6 7 8 9 T Without check valve P S Plug Socket Note) KKA7/8/9 is not available without a check valve.

30

y e i w Note Manganese phosphate Chromated Description Material Steel Aluminum Steel Steel Synthetic rubber Steel Steel Steel No. 1 2 3 4 5 6 7 8 Stud Case Ring Cap Dust cover Set screw Rod end nut Washer Black zinc chromated Zinc chromated Zinc chromated J J Dimensions JC20 to 63 M Center of sphere M U U D F G P H A R E B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore size

Compressed Air Preparation Filter

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170