VQ7-6/7-8

end plate assembly Manifold block assembly U side end plate assembly < End plate assembly > AXT512 A AXT512 1A End plate position Cylinder port position Wiring specification L side R side L R L side R side L R Side Bottom A B P, R port size Rc1/2 Rc3/4 12 One-touch fitting 04 06 C12 Cylinder port size Rc3/8 Rc1/2 03 04 < Manifold block replacement parts> Part No

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

EXxx-OMY0006CN

L/A LED Table 10-22 L/A LED L/A 1/2 SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2 SI 1/2XF1/2 * *: Link LED Act LED 10.9.1.5. FO1/2 LED Table 10-23 FO 1/2 LED FO 1/2 2dB 0dB 2dB 0dB 10.9.2. LED 2 LED UT1 UT2 UT1 UT2 IN0, IN1, , IN7 M IO (Zone M) / Z1,Z2,Z3 (Zone 1-3) / Fig. 10-4 EX245-FPS1/2/3 LED 2 10.9.2.1.

AFF

Standard size (Applicable compressor) Compressor output Symbol 75A 75 kW 125A 110 to 125 kW 150A 150 kW 220A 180 to 220 kW Page for details Description Symbol Nil Mist separator for high flow rate (Nominal filtration rating: 0.3 m) X13 P.71 Accessory Port size Symbol Nil Description D G F L Size Symbol 75A Applicable body size 125A 150A 220A Auto drain Pressure gauge Companion flange Anchor

V

PT* Remove (N) when ordering T NPTF T Y P E 1 Body Ported 3 Manifold Type Common SUP 5 Manifold Type Individual SUP Vacuum SERIES NZM VACUUM EJECTOR MANIFOLD D I M E N S I O N S NZM VA C U U M E J E C T O R M A N I F O L D 1 10 Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W

EXxx-OMY0004

L/A indicator Table 10-22 L/A indicator L/A 1/2 Meaning Green ON Connection via Ethernet to the SI Unit via Port 1/2 (XF1/2) Green OFF No connection established via Port 1/2 (XF1/2) Yellow ON Transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Yellow OFF No transmission or reception of Ethernet telegrams on Port 1/2 (XF1/2) Orange Flash Received Node flash request : When

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

entry O-ring + Wiring top entry Digital pressure switch (Body only) 25 65 NPN output Output PNP output + Lead wire With unit conversion function Nil Note 2) M P Note 2) Unit Note 1) Fixed SI unit Pressure unit: psi (Initial value), with unit conversion function + Nil L Without lead wire Lead wire Lead wire with connector (2 m) + Nil Without accessories (Switch body only) Accessories With

PA300/500/700

N.O. 101.2 kPa to 0.2 VPA344 544 744 Pilot pressure (MPa) Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Same as operating pressure (Min. 0.2 MPa) 10 to 50C (No freezing. Refer to page 5-11-4.) Not required (Use turbine oil Class 1 lSO VG32, if lubricated.)

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Critical pressure ratio Critical pressure ratio Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 M3 x 0.5 20 0.06 20 0.06 4.7 0.15 M5 x 0.8 90 0.25 80 0.22 33 1/

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

_OUT2 6 N.C. 5 N.C. 4 White CH1_OUT2 3 Black C/Q (CH1_OUT1) 2 Blue L 1 Brown L+ 4 Black: 3 Blue: L C/Q (CH1_OUT1) 100 42.5 Front protection cover + Panel mount adapter 53 55 or more 47 37.5 +0.1 0.2 (2) 9.4 42.4 46.4 55 or more 4 x R1 or less Front protection cover Panel mount adapter Panel Waterproof seal m48 conversion adapter + Panel mount adapter (2) 6 1.5 48 Panel fitting dimensions

Air-hydro Unit

S 100 L Flow control valve (With pressure compensation) Enables constant movement even if there are load fluctuations.

Digital Flow Switch (Remote type monitor unit)

Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/

Voltage Monitor for PFMV5

min 0 to 3 L/min 0.5 to 0.5 -0.05 to -1 to -1 L/min -3 to 3 L/min L/min L/min Display flow range Set flow range -0.025 to -0.05 to -0.15 to -0.525 to -1.05 to -3.15 to Flow 1 0.525 L/min 1.05 L/min 3.15 L/min 0.525 L/min 1.05 L/min -3.15 L/min Minimum setting unit 0.001 L/mim 0.01 L/mim 0.001 L/mim 0.01 L/mim Indication unit Voltage : V Instantaneous flow : L/min, CFH(ft 3/h) 2 Repeatability

PSE530/200

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without cable Sensor cable (3 m) M5 Port size L M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.) When only optional parts are required, order using the part numbers listed below.

Digital Pressure Switch

Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit

CC

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc 1/8 Pilot air port size RHC MK(2) Oil port size Rc RS Q G Throttle valve locking screw RS H A RZQ Oil port size Converter side Oil port size Cylinder side 2-S Wall mounting screw Unit port U1, U2 MI W S CEP1 CE1 CE2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18

SI unit for CC-Link

An example of when the SI unit station number is set to 01 is shown below.

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)