Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF)

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPT NPTF G N T F VV3ZA2 031 01 50 Thread type VZA200 01 S Thread type Nil Nil Rc NPT NPTF G Rc NPT NPTF G N T F N T F 1800 Series VZA200/400 3 Port Air Operated Valve Dimensions Body ported : VZA4 2-P-01 Pilot port M5 x 0.8 Mounting hole 2 x 3.4 2 x 3.4 mounting hole (Non-locking

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH T-SPACERIS10T-20-D to IS10T-60-D T 30 IS10 D Symbol Description Body size 20 30 40 50 60 Nil Rc Pipe thread type NPT G + 01 1/8 02 1/4 03 Port size 3/8 04 1/2 06 3/4 + Nil 0.1 to 0.4MPa a Set pressure range 6Note2) 0.1 to 0.6MPa + Semi-standard Nil 0.5 3 b Lead wire length Z 5 + Nil MPa c Pressure unit of the scale plate P MPa/psi dual scale Note 1) A semi-standard

70pvpump

Diaphragm material 1 VXA PTFE (Fluoro resin) JIS Symbol Style VN Port size 1 3 Built-in solenoid valve Air operated LVC 01 1/8 (6A) FLUID OUT AIR SUP AIR EXH LVA Thread type FLUID IN Nil T Rc NPTF G NPT LVH Built-in solenoid valve F LVD N T, F, N are options.

AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF)

Function: 2 (Normally Open), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: T (NPTF)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: T (Power Saver), Voltage: 6 (12VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF)

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

0 w !2 ASR ASF Component Parts Component Parts No. Model No.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

t y q SUP OUT Component Parts Replacement Parts Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w No.

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Bodv PST Seat NSR 0 Lead wire Vinvtchloride (V,nvl sheath) Pressure sensor SUS630 G Fittings SUS304 2 Digital Pressure Switch Series ZSE6/ISE6 URJ'/4 Scale:75% (mm) Dimensions 30 (Union Ring JOint) 39 LCD W.lh back hght o -A '" '" ~ 00 '" []I-: 1DOWN button UP bulton [ ,~ LED (red) LED (green) I SET bunoo [, t::t::;I UAJ~ L 12.3 Sensor Depth 6.5 kj--t==:;A/ Welded section 2-flf2.7 20

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

Series: JSY5 (5000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: M (M Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: 01 (Rc1/8), PE Plate: PE (JSY1

ALB900

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

Port Thread: 01 (Body Ported Rc1/8), Bracket: F2 (w/side Bracket)

Port Thread: 01 (Body Ported Rc1/8), Bracket: F2 (w/side Bracket)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)