Vacuum System Peripherals:

q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. 616 3 Port Pilot Solenoid Valve 10-SYJ500 Construction r w t q y e r w t q y e N.C. N.O.

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

HRX-OM-Q026

HRSH100-W*-20-*T HRSH150-W-20-*T HRSH200-A-20HRSH200-W-20R8-5 M5 30 3 phase 40 4 cores x AWG8 200 to 230 (4 cores x 8 mm2) VAC *including (60Hz) HRSH250-A-20HRSH250-W-20HRSH300-A-20ground 50 HRSH100-A-40HRSH100-W-403-phase 20 R5.5-5 380 to 415 HRSH100-W*-40-*T HRSH150-A-40HRSH150-W-403 x 5.5 mm2 VAC For power (3 x AWG10) (50/60Hz), line M5 30 3-phase 30 HRSH200-A-40HRSH200-W-40R14-5 460

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

VS 8-2/VS 8-4

t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8-2-DFHG FIG FJG VSR8-2-FG-DVSR8-2-FG-SVSS8-2-DFHG FIG FJG VSS8-2-FG-DVSS8-2-FG-SDescription No.

modular-press-e

IN OUT Replacement Parts r w e t Part no. AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

Modular F.R.L. Pressure Control Equipment

IN OUT Replacement Parts r w e t Part no. AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

Title not found

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol With Subplate CvO.7 w Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

Series VQ Metal Seal/Rubber Seal Body Ported

assembly (8 terminals) T kit (4) (4) r AXT100-2-TA2 Terminal block assembly (8 terminals) T kit t VQ Note 1) A S kit is composed of a flat cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

CY1

4 @9 @5 u y t r w @6 #0 !2 o e i !0 q !8 !5 @0 !9 @1 @2 @3 Port Parts list Parts list No. Description Cylinder tube No.

MB

0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol CvO.7 w With Subplate Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

Table of Contents

AC Symbol Specifications DC (1.0 W) (1) Standard type Nil With light/ surge voltage suppressor M: M plug connector With lead wire 3 position closed center (1.5 W) (0.5 W) H (2) High pressure type 3 Note) Low wattage type Y (2) With light/ surge voltage suppressor MO: M plug connector Without connector For power consumption of AC type, refer to page 2-4-36.

Air Fittings & Tubing

H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.

Secondary Batteries

Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +

VQ4000

Electrical entry G Body Coil voltage Lead wire length 0.6 m 5: Plug lead sub-plate 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet H Function Nil Y(1) R(2) Standard type (1 W) Low wattage type (0.5 W) External pilot Seal 0 1 Metal seal Rubber seal Note 1) Note 2) Applicable to DC specifications.

CLA

111 13 17 I M 26X t.5 Wtthout boot PG H ZZ o. 42 11 20 45 153 8 60 9 12 SO 42 100 51 215 52 \Bore size MM PH PL PW S W FV eFO FT FX FY FZ ) (mm) XI US N P t 40 "I ,~20 27 " 1 50 30 % 46 10 2' 50 168 a 70 9 12 90 50 110 58 237 58 48.5 13 23 60 182 0 86 i-11 .5 15 105 59 130 58 25 ; 58 55 15 23 70 208 0 102113.5 18 130 76 160 71 296 80 f 63 :y ~ . 16 31 % Slroke ~ 65 21.5 80 305 80 37 " 1 100