AW

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

VS 8-2/VS 8-4

t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8-2-DFHG FIG FJG VSR8-2-FG-DVSR8-2-FG-SVSS8-2-DFHG FIG FJG VSS8-2-FG-DVSS8-2-FG-SDescription No.

Digital Flow Switch (Integrated display type) ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H A function to store the accumulated flow value in the products internal memory. The flow value will be stored at a set time interval of either 2 or 5 minutes.

5 Port Solenoid Valve Series VQZ1000/2000/3000

VQC VQZ SQ VFS VFR +24 V +24 V VQ7 Power supply for output Power supply for output 0 V 0 V Power supply for the input and for the control unit of the Gateway Power supply for the input and for the control unit of the Gateway +24 V 24 V Caution 1. Take measures to avoid applying repeated bending force or pulling force to the cable.

Vacuum Pad

T male thread adapter assembly (With gasket) p.3 p.3 Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T female thread adapter ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V p. 11 q Pad unit Dimensions

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Hygienic Design Cylinder Series HY

V W V Port U U 2 x P (Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24 32.5 38 46.5 56.5 12 16 20 20 30 35 40 45 16 18.5

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

MG

Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200

Rotary Table/Rack & Pinion Style Series MSQ

12 V Reed switch Solid state switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9BAV 12 V 3-wire (NPN equiv.)

0.

Standard 0.35 [(With light: 0.4 (DIN terminal with light: 0.45)] Power consumption (W) High speed response, high pressure DC 0.9 [(With light: 0.95 (DIN terminal with light: 1.0)] Made to Order (For details, refer to page 34.) 0.78 (With light: 0.81) 0.78 (With light: 0.87) 100 V 110 V [115 V] 0.86 (With light: 0.89) [0.94 (With light: 0.97)] 0.86 (With light: 0.87) [0.94 (With light: 1.07

Rotary Actuator/Vane Style Series CRB1

Load voltage Lead wire length (m) No Yes Yes Indicator light Wiring (Output) Auto switch model Type Electrical entry Applicable load DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) Grommet T79 2-wire 12 V Connector Relay, T79C Solid state switch 24 V PLC S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V S7P 3-wire (PNP) Grommet 100 V R73 Relay, Connector R73C Reed switch 2-wire 24 V PLC 100 V or less Grommet

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

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Note) Only DC voltage is available. 24 VDC M12 connector (5-pin type) Note) 12 VDC Pilot Valve Specifications V116--1 Pilot valve specifications Electrical entry Conduit terminal, DIN terminal, M12 connector DC 12 V, 24 V Coil rated voltage V AC (50/60 Hz) 100 V, 110 V, 200 V, 220 V 10% of rated voltage Allowable voltage range Power consumption W DC 0.35 W (With indicator light: 0.58 W) 100

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

conduit 3-wire (NPN) Solid state auto switch G39C G39 2-wire K39C K39 12 V M9NW V V V v v G59W V V v v 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes 3-wire (PNP) M9PW V V V v v G5PW V V v v 2-wire 12 V M9BW V V V v v 24 V K59W V V v v Grommet 3-wire (NPN) 5 V, 12 V M9NA** v v V v v 3-wire (PNP) M9PA** v v V v v Water resistant (2

MK

A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F P5DW 200 V A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Grommet Yes 100 V 12 V Relay, PLC 2-wire 24 V Connector 12 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 2-wire 12 V Connector Relay, PLC Yes 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic output

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W 36 46 46 X 11 13 13 Y 15 17.5 17.5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 VXE210 VXE220 VXE220 VXE230 VXE230 Applications 18 Series VXE21/22/23 For Air Dimensions: Manifold/Base Material: Aluminum Normally closed (N.C.): VXE21/22/23 L2 K K L1 N H F D B (B) C A J A V S Q Approx. 300 U 2 x M W X Approx. 280 32 25 D side Stations

Air Cylinder

Operating Range Bore size Auto switch model Bore size (mm) Auto switch model 5 6 8 5 6 8 D-A9 /A9 V D-M9 /M9 V D-M9 W/M9 WV D-M9 AL/M9 AVL 11.5 12.5 12 D-A9 /A9 V D-M9 /M9 V D-M9 W/M9 WV D-M9 AL/M9 AVL BS5-125 BS5-125 BS5-160 6.5 6.5 6 * Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Series CE1

A76H 5V A96 A96V IC V V A72H A73H A72 A73 200V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V Grommet Yes Reed switch Solid state switch V 100V 12V A93 A90 A93V A90V Relay PLC 2 wire A80H A80 A73C A80C A79W F7NV IC No Yes No Yes 5V,12V 100V 24V 24V 12V V V V V Connector IC 5V,12V Diagnostic indication (2 color) Grommet F79 IC 5V,12V 3 wire (NPN) 3 wire

rep-filter-e

(c) V-band tightening Fig. (c) V band tightening Industrial Filters 467 Series FGA Replacement Procedure of Element 1 1. Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !