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U RL ht t p: //w w w . sm cw orl d. com 4141, Sot okanda, Chi yodaku, Tokyo 1010021 J APAN Tel : +81 3 5207 8249 Fax: +81 3 5298 5362 1 Saf et y i nst ruct i ons These saf et y i nst ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

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U RL ht t p: //w w w . sm cw orl d. com 4141, Sot okanda, Chi yodaku, Tokyo 1010021 J APAN Tel : +81 3 5207 8249 Fax: +81 3 5298 5362 1 Saf et y i nst ruct i ons These saf et y i nst ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

VQ7-6/7-8

1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Options FPG Nil N None Indicator light Indicator light with surge voltage suppressor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Z FIG V 5 (R1) 3 (R2) 1 (P) Optional

17

Ball bushing P.283 Best Pneumatics Water-resistant/MGP R/V P.283 Best Pneumatics Heavy duty guide rod/MGPS Slide bearing P.319 Best Pneumatics Miniature Guide Rod Cylinder/MGJ P.255 Best Pneumatics Compact Guide Cylinder with Lock/MLGP Slide bearing P.881 LOCK Ball bushing Best Pneumatics Hygienic Design Cylinder/HYG Slide bearing P.873 Series MGP (Basic type), Stroke Variations New New New

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

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T O O R D E R NCJP P I N C Y L I N D E R-D O U B L E A C T I N G D Note: Pre-wired Switches with 3/4 Pin Connectors available, please consult SMC Customer Service AUTO SWITCH SPECIFICATIONS L D-90 D-97 D-90A D-93A Switch Model NCDJP Relay/PLC, Sequencer, IC Circuit Applications <24V 24VDC <24V 100VAC 24VDC 100VAC Voltage Rating L E A D W I R E L E N G T H A U T O S W I T C H 50MA 5~40MA 50MA

Lightweight and Compact

Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

P.1516 P.1410 P.125 P.219 P.285 P.329 P.353 P.409 P.447 P.463 P.479 P.547 P.599 P.771 P.791 P.833 P.854 P.858 Actuator page reference (: Best Pneumatics) P.39 P.21 1264 Applicable Cylinder Series 1 Auto Switch Guide CDY1S/CY1L CY1H CY1F CYP MXH MXU MXS MXQ/MXQR MXF MXW MXJ MXP MXY MTS MGJ MY1W HYDC HYDG MY1B-Z MY1HT Cylinder series MY1M MY1B MY1C MY1H CY3R MGP MY2 MY3 25 to 40, 63 to 100

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

E-ITV-STD-RF-A

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

VQ20/30

PB Construction Component Parts q e Description Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Material No. q w e r t y u r Resin Stainless steel Stainless steel Stainless steel NBR HNBR, Resin w t y u 17-2-83 Series VQ20/30 Dimensions: Series VQ20 In-line Type: Grommet (G) VQ21A1-GBracket mounting holes Mounting holes 2-3.2 through 2-3.2 through Light

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

rep-filter-e

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.460 FGD Vessel Series P.461 FGE Vessel Series P.463 FGET Vessel Series P.466 FGG Vessel Series P.468 FGA Vessel Series P.472 FGB Vessel Series P.476 FGC Vessel Series P.478 FGF Bag Filter P.480 FGH High Precision Filter for Liquids P.482 FQ1 Filter for Cleaning Fluid/Quick Change Filter P.483 FN1FN4

Industrial Filters Replacement Procedure

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.460 FGD Vessel Series P.461 FGE Vessel Series P.463 FGET Vessel Series P.466 FGG Vessel Series P.468 FGA Vessel Series P.472 FGB Vessel Series P.476 FGC Vessel Series P.478 FGF Bag Filter P.480 FGH High Precision Filter for Liquids P.482 FQ1 Filter for Cleaning Fluid/Quick Change Filter P.483 FN1FN4

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to dimensions on p.4.6-11 and p.4.612 for details. Chrome treatment (Epoxy coating on inner surface) Housing Body q w e Tempered glass Sight glass AMD850 is aluminum casting Replacement Parts AMD450 Part No. Description Material No.

S

P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.

VG342

Power consumption 2 W DC, 2.2 W (With indicator light) Piping 100 VDC: 2.4 W, 2.6 W (With indicator light) Port Passage R Exhaust side (Plug, in case of 2 port valve) P A N.C. Inlet Outlet Continuous duty type: VG342---E Use Continuous duty type if energizing the valve for a long time. Exhaust side (Plug, in case of 2 port valve) N.O.