SMC Corporation of America
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4 Bumper B Bumper B Bumper B Bumper B Resin Resin Resin Resin (Only 63 is common to the bumper A.) (Only 63 is common to the bumper A.) 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) HYQB20R-PS HYQB32R-PS HYQB20-PS HYQB25-PS 20 25 HYQB32-PS HYQB40-PS HYQB50-PS HYQB63-PS 32 40 50 63 Set of nos. above o, !0, !4.

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

How to see the manufacturing code P O 001 January 2011 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2011 P Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2012 Q 2 P 2013 R 3 Q Fig. 1-3 Position of product label 1.4.2 Earth Label Fig. 1-4 Earth label HRS Series 1.4 Other Labels 1-5 HRX-OM-O021

(B contact) Standard GXL-8FB 3 wire N.C. (B contact) Varying frequencies GXL-8FIB 2 wire N.O. (A contact) Standard GXL-8FU 2 wire N.C. (B contact) Standard GXL-8FUB Switch specifications (SUNX Corporation) GXL-8F(I)(B) GXL-8FU GXL-8FUB Part no.

A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.

Model C [dm3/(sbar)] C [dm3/(sbar)] Av x 10-6 m2 Cv converted Cv converted b Cv b Cv N.O. N.C. 0.12 0.03 0.35 0.03 0.72 1 M5 1/8 (6A) 0.04 0.13 0.96 VDW200 0.52 0.04 1 0.31 0.08 0.45 0.09 1.9 1.6 0.52 0.16 0.52 0.16 3.8 2 1.8 1/8 (6A) 1/4 (8A) VDW300 0.13 0.38 1.0 3.1 0.28 0.52 0.30 0.50 0.12 6.7 3 1.5 0.44 0.49 0.46 11 4 17-2-75 16 Series VDW200/300 Construction VDW250 VDW350 i o !0 i !

(Equivalent lead (5)Storke [mm] (7)Cable type (6)Motor option Size Without cable Nil Nil Without option Standard cable 16 25 S R B With lock Robotic cable (Flexible cable) 50 100 150 (10)I/O cable length * (9)Driver type * [m] (8)Cable length * [m] Power supply Without cable Nil Nil Without cable Compatible driver voltage(V) Without cable (Connector only) H 2 2 Nil Without driver 1

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Document No.DOC1018377 PRODUCT NAME Clean Air Filter MODEL / Series / Product Number SFD110- Document No.DOC1018377 Contents Safety Instructions P.2 1. Application P.7 2. Standard specification P.7 3. How to order P.7 4. Construction and Replacement parts P.8 5. Maintenance P.8 6. How to mount P.8 7.

I nput si gnal O ut put pressure of E/P regul at or O N O FF Sw i t ch out put 10 Key l ocki ng f unct i on CAU TI O N The keys are l ocked af t er t urni ng t he pow er on and can not be operat ed.

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

Brazil EXW1-BMJAAE E EXW1-BMJAAN N EXW1-BMJABE E EXW1-BMJABN N A Base MJ B A B EXW1-RDXNE4AE E EXW1-RDXNE4AN N EXW1-RDXNE4BE E EXW1-RDXNE4BN N EXW1-RDYNE4AE E EXW1-RDYNE4AN N EXW1-RDYNE4BE E EXW1-RDYNE4BN N EXW1-RDMPE3AE E EXW1-RDMPE3AN N EXW1-RDMPE3BE E EXW1-RDMPE3BN N EXW1-RDMNE3AE E EXW1-RDMNE3AN N EXW1-RDMNE3BE E EXW1-RDMNE3BN N A DX N B E4 A EXW1 DY N B Remote R A P B DM E3 A N B -17No.EX-OMZ0016

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

Cable color Signal Nil A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 S Standard cable Cable color Connector D terminal no. Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.