ML2B

46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22

ML2B

Bore size 25 mm 32 mm 40 mm 25 32 40 Auto switch Nil Without auto switch For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

Speed Controller: Standard Type In-line Type AS Series

Construction: AS1000-M5 Component Parts No. Description Material 1 2 3 4 No.

CRB1/Size: 10, 15, 20, 30

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

Model Selection 1

Manifold 1/8, 1/4, (3/8) 2, 3, 4.5, 6 17-2-74 VDW200/300 C.O. 3 port Single unit M5, 1/8, 1/4 0 to 0.9 1, 1.6, 2, 3, 4 Pilot operated Diaphragm operation 1/4 to 1 32A, 40A, 50A 10, 15, 20, 25, 35 40, 50 17-3-33 VXD21/22/23 N.C./N.O. Single unit 0.02 to 1 Pilot operated Disk operation 1/4 to 2 32A, 40A, 50A 10, 15, 20, 25, 35 40, 50 VXP21/22/23 17-3-43 N.C./N.O.

RSH/RS1H

10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [

RSH/RS1H

10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

ZSE2/ISE2

Easy and simple wiring Connector type 16-6-7 2 Series ZSE2/ISE2 How to Order Operating pressure range/ Setting pressure range Piping specifications Single mounting R 1/8, M5 x 0.8 01 T1 Single mounting NPTF 1/8, M5 x 0.8 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) thread.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Can select female thread (M5 x 0.8).

Ozone Resistant

120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ

IDX-OM-Z004

-1 IEC ) [30mA 30A (IDF100F, IDF125F, IDF150F)] 2 (12AWG) 1418mm4 () 3.5mm 0.6m 30m (1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 IDF100150F-W 2.2 2 7 IDX-OM-Z004 2 2 (20AWG)17mm 6 0.5mm 0.9m 30m (1.3 ) M3 : 6.5mm M3 0.631Nm OFF 56 alternate ON ONOFF OFF IDF100150F-W 2.2 2 8 IDX-OM-Z004 2 2.3 2.2.1 1. 2. 2 3. 4. 5.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

25

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

Heavy Duty Stopper Cylinder Series RSH/RS1H

10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Note 1) M5 size Note 2) Brass parts are all electroless nickel plated. Model Applicable tubing O.D. Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.