15

Dimensions: Ball Screw Drive LEFS25 (102) +0.025 0 3H9 ( ) depth 3 Body mounting reference plane Note) 64 4 x M5 x 0.8 thread depth 8.5 45 38 3.5 50 +0.025 0 3H9 ( ) depth 3 Motor type: NZ, NY, NX L A (Table traveling distance) 52 31.5 FF Motor mount 4 x FA thread thread depth FB 10 (52) 57.8 Mounting pitch: FC 38 Motor 38.5 45 47 48 6.5 (48) Motor mating part: FD, depth FE 24 6 M4 x 0.7

I/O Configurator (NFC version)

Setting window (page 38) for details of parameters. -95No.EX-OMV0017-C (7) The parameter setting of the Wireless Base is complete.

I/O Configurator (NFC version)

Setting window (page 38) for details of parameters. -94No.EX-OMV0017-B (7) The parameter setting of the wireless master is complete.

I/O Configurator (NFC version)

Setting window (page 38) for details of parameters. -94No.EX-OMV0017 (7) The parameter setting of the wireless master is complete.

I/O Configurator (NFC version)

Setting window (page 38) for details of parameters. -94No.EX-OMV0017-A (7) The parameter setting of the wireless master is complete.

Cylinder with Lock Series CNG

38 93 1/8 44.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 to 200 20 to 200 19.5 22 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 to 300 20 to 300 19.5 22 17 45 45 104 1/8 51.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 to 300 20 to 300 27 30 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 to 300 301 to 500 20 to 300 301 to 500 (mm) Without rod boot With rod boot Bore size

Cylinder with Lock Series MNB

C 4FD A K BN F GF GB Width across flats B1 Cushion valve 4-J MM H1 Q D E B V FB FY FT N FX FZ Width across flats ZZ + Stroke (mm) Width across flats 10 Effective thread length (mm) Bore size (mm) Stroke range (mm) BP A B1 H1 BN C D Ee11 F FT FX FY FZ GA GB GC GD FB B FD 32 1/8 22 17 6 97 32.5 12 30 13 10 72 38 87 83 13 45.5 13 56 54 to 500 7 19.5 40 1/8 30 22 8 104 38 16 35 13 10 83 46

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

72.5 82.5 CH2F 38 33.5 38 33.5 36.5 71 81 40 CH2H 38 33 38 33 37 71.5 81.5 CH2E 43 36.5 42 36.5 43.5 78 88 CH2F 41.5 36.5 41.5 36.5 41.5 76 86 50 CH2H 42 36 42 36 42.5 77 87 CH2E 48.5 43 47 43 50.5 85 95 CH2F 46.5 43 46.5 43 48.5 83 93 63 CH2H 48.5 43 47 43 50.5 85 95 CH2E 58.5 55.5 57 55.5 59 93.5 103.5 CH2F 56.5 55.5 56.5 55.5 57.5 92 102 80 CH2H 59 55.5 57.5 55.5 59.5 94 104 CH2E 66.5

C95

38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 15 17 24 24 30 32 4 4 5 5 5 5 32 40 50 63 80 100 1.11-7 Series C95 With Mounting Bracket Foot L Centre Trunnion T Flange F Mounting at the back Mounting at the front Rear single

MXQ

38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 89 89 99 109 125 157 200 225 MXQ16L-10 MXQ16L

Booster Regulator/Air Tank

Model VBAT10A VBAT05A VBAT20A VBAT38A Tank capacity (L) 38 5 10 20 Max. operating pressure (MPa) 1.0 2.0 Material Carbon steel Model VBAT10S VBAT05S VBAT20S VBAT38S Tank capacity (L) 38 5 10 20 Caution Max. operating pressure (MPa) When used as a single unit (not connected with a booster regulator) and pressurized at over 1 MPa at normal temperatures, the air tank falls under the scope of

CNG

38 93 1/8 44.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 Up to 200 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 Up to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 Up to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 Up to 300 301 to 500 Without rod boot With rod boot

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

PSxx-OML0002CN

-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U (10 ) ZS-27-01 4mm ZS-38-C4H O 6mm ZS-38-C6H O 1/4 inch ZS-38-N7H O 4mm ZS-38-C4L O 6mm ZS-38-C6L O 1/4 inch ZS-38-N7L O -9No.PS-OML0002CN-G LCD ((OUT1),(OUT2)) LCD 4 ON/OFF ON/OFF

Battery-less

Series Weight [kg] Series Weight [kg] LEY40EA 9 LEYG40EA 7 LEY40EB 19 LEYG40EB 17 LEY40EC 38 LEYG40EC 36 MTrademark EtherNet/IP is a trademark of ODVA. DeviceNet is a trademark of ODVA.

SMC Pneumatic Clean Series

(50) 38(50) 48 48 D-B54 A 31.5 31.5 32.5 29.5(38.5) 36.5(48.5) 36.5(48.5) 46.5 46.5 Bore size B 16[32] 16[32] 17[33] 19[28]<37> 24[36]<48> 24[36]<48> 32[46] 32[46] Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 B 14.5[30.5] 14.5[30.5] 15.5[31.5] 17.5[26.5]<35.5> 22.5[34.5]<46.5> 22.5[34.5]<46.5> 30.5[44.5] 30.5[44.5] Hs 27.5 30 33.5 38 43.5 50.5 59 69.5 20 25 32 40 50 63 80 100 Note 1) Values in "(

CG5-S

6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 to 1200 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 1/4 109 174 80 to 1400 40 37 32 100 50 25 82 11 9 28

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58