Series VQ1000/2000 10- 21- 5 Port Solenoid Valve L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 563 Series VQ1000/2000 1021Construction Directional Control Valves Air Grippers Modular F.
size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36
A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5
183 60 21-/2210-/11-/1286 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS32, CXSL32 10-/11221221Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment S ZZ SS 38 16 14 2-6.9 through 8 30 1 M10 x 1.5 x 8L 2-11 counter bore depth 6.3 36
alloy Stainless steel Aluminum alloy Carbon steel Stainless steel Rolled steel plate Rolled steel plate Aluminum alloy Rolled steel plate Urethane rubber Aluminum alloy Special resin Special resin Special resin Aluminum alloy Carbon steel Type C retaining ring for hole Phosphate coated (15) (10, 25) Type C retaining ring for axis 29 Chromate (Only for 25) Retaining ring 30 31 32 33 34 35 36
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port
L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction
RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 2-2-36 Base Mounted Series VQC Plug-in Unit VV5QC41 S Kit (Serial transmission kit: EX240) 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port VQC SQ 23 SMC SMC SMC SMC SMC SMC SMC 12 20.5 8 VQ0 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 75.5 61.5 77.5 72 43.5 42.7 VQ4 15.7 (1.5) 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ5 11.5 21.5
Indication of valve type Type indication (Gasket) Blanking plate Mounting hole n-Rc , 8 1 4 1 (Pitch) (Pitch) Stations 2 3 4 5 6 7 8 9 10 Model Symbol L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36
Tightening Torque for Piping Leakage current Connection thread Proper tightening torque (Nm) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 Rc1 36 to 38 AC coil: 5% or less of rated voltage DC coil: 2% or less of rated voltage Mounting Warning 4. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port etc. 1.
Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.
Note 3) The symbol F in the dimensions indicates the position where the clamping force is generated defined by the product specifications. 82 WRF100 Dimensions WRF-S/S-type clamp arms (Without cover) WRF100-S200/S240 4 x M8 x 1.25 depth 12 108 60 2 x M12 x 1.75 through 25 25 80 0.015 0 2 x 8H7 ( ) 60 0.05 depth 12 (2 x 4 x M5 x 0.8 through) ( ) C B For limit switch mounting A 60 60 36 0.5
ZH20DA-11-13-13 112.2 62.2 Inch 1 Dimensions when the standard bracket is mounted Body Ported: ZH D A--S L 18 20 Standard bracket A-A 6 2 x 4.2 4 A 6 3.5 10 12 27 36 A Refer to page 233 for handling the bracket. 15 12 Silencer ZH05 to 15DA Model A B ZH05DA---06/07 23.2 11 ZH07DA---06/07 ZH10DA---08/09 30.8 13 ZH13DA---10/11 41.9 16.5 ZH15DA---10/11 B A ZH18/20DA---12 Directly mounted silencer
(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats
1-1/4 to 2"st 1/4" to 1"st W R Q P O N M2 M1 K J I H E D Z 150 (1-1/2") 200 (2") 250 (2-1/2") 0.63 0.50 0.70 1.88 2.00 1.25 3/8-24UNF 2.63 0.19 0.50 1.55 2.19 0.22 0.34 0.25 0.20 2.19 0.56 NPT1/8 0.75 0.70 1.81 2.53 1.19 1/2-20UNF 3.13 0.20 0.63 1.90 2.69 0.22 0.34 0.25 0.20 2.73 0.56 NPT1/8 0.75 0.70 2.31 2.84 1.44 1/2-20UNF 3.75 0.39 0.63 2.30 3.25 0.28 0.41 0.33 0.26 3.23 0.69 NPT1/4 36
Port size Drain tube: O.D. 10 (Thread symbol N: 3/8 inch) (820) [200 VAC specification] Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36
size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36
operation port) HH 9 N K M 1 Cushion needle O H FF PP L DD EE DDEE L NN MM NN MM 2-PA 2-PA LL KK CC CC (Hexagon socket head taper plug) (Hexagon socket head taper plug) KK LL J A G G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36
(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double acting c + Stroke 6 8 13() 21() 13() C + Stroke Single acting, Spring return CUJ Solid state switch D-F8 D-M9 A 10 Double acting 13.5(15) 22(24) 13(36
A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5