1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

Clean Air Module

or less 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption 170 mA or less 160 mA or less Withstand voltage 1000 VAC for 1 min. between external terminal and case 50 M or more (500 VDC measured via megohmmeter) between external terminal and case Insulation resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Noise resistance Lead wire Lead wire with connector Enclosure

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Specifications Bore size (mm) 25/32/40/50/63 Item 1.05 MPa 0.7 MPa 0.18 MPa 10 to 60C (With no freezing) 50 to 300 mm/s Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Grease Cleanliness class (ISO class) +1.8 0 +1.4 0 +1.0 0 0 to 250 st: , 251 to 1000 st: , Over 1001 st: Fluorine grease Class 5 Magnetic

Swivels

Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-26 Introduction S Series Swivels S Series Swivels Specifications Body size 1/4" 3/8" 1/2" 3/4" 1 Maximum Rated Pressure (PSI) 3000 3000 3000 3000 3000* Temperature Range (standard) ( -40 to 250 F ) Introduction The S Series Swivel product line complements the Quick Coupling Divisions PS Series

Serial Network

(U, D)-SCS1 EX124 (U, D)-SCS2 EX140-SCS1 EX140-SCS2 EX120/121/122-STA1 EX123(U, D)-STA1 IN313-TA1 N N Y Y 16 8 16 8 16 8 16 16 16 16 8 16 8 0 0 0 0 0 0 0 0 0 0 0 0 0 VQ, SX, SY & SV VQ2000/4000/5000 CompoBus/S OMRON N N N Y SQ1000/2000, SZ3000/5000 VQ, SX, SY & SV VQ2000/4000/5000 (N)VFR/S, (N)VZS, ISO SYSBUS N EX120/121/122-SSL1 N VQ, SX, SY & SV EX120/121/122-SSL2 N S-Link SUNX EX123 (

Modular Type Regulator Series AR

60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60 AR25

MXU

Make sure to connect a speed controller and adjust it to a speed of 500 mm/s or less to operate the cylinder.

Escapements Series MIW/MIS

12 20 12 20 12mm 20mm MIW only accommodates a stroke of the same length as the cylinder diameter. 12 12 1 A S D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12 2 pcs. 1 pc. 12mm 20mm Nil S Stroke adjuster 20 Type of auto switch Nil A No Yes Stroke Without auto switch (built-in magnet) Nil 10 20 30 10mm

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

MXU

Make sure to connect a speed controller and adjust it to a speed of 500 mm/s or less to operate the cylinder.

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

Steam Valve

) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

VN LVC LVA E 21 S LQ2 LVH LVD One nut (including insert bushing) of the nuts is not attached. Please refer to below piping example.

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

CEx-OMQ0013

1.0A AC DC500V 50M 690g 13 3-3 7.6 R03-R8M 205m 50cm 14.5mT DC10.826.4V1 50mAMAX. 0.1mm/ 02mm 1 MAX.DC30V50mA) A /B 500mm/s AC500V1 (12E ) DC500V50M (12E ) 33.3Hz6.8G XY 2 Z 4 JIS D1061 30G XYZ 3 IP65 () 5m10m15m20m R03-R8F 1CEU2 14 4. 4-1 () CE2 B 40 100 J 2 B 1 L n F G C D () T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

CRB1/Size: 10, 15, 20, 30

CRBU Basic (Side port) CRB1FW Basic (Axial direction port) CRB1FW W/ angle adjuster CRB1FWU W/ auto switch CDRB1FW W/ angle adjuster and auto switch CDRB1FWU Size Size Size Size Size Angle , #11 (#1+#11) , #12 (#3+#12) , #13 (#5+#13) , #14 (#7+#14) , #15 (#9+#15) S SCRB SE SCRB S SCRB S SCRB S SCRB Size Size Size Size Size Angle Angle CRA1 Angle Angle CRQ Ass'y Part Number: P211070