Direct Operated Precision Regulator Modular Style Series ARP3000 1

ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

Digital Flow Switch ( compatible)

(page 83) 2030 0x07EE 0 R/W Cut (Zero cut-off setting) U8 1 Y Setting range 0 to 10 1.0% increments 0: oFF 1: rAC 2040 0x07F8 0 R/W inP (External input setting) U8 1 Y (Accumulated value reset) 2: rPb (Reset peak/bottom) 2100 0x0834 0 R/W AoUt (Setting of analogue output) U8 0 Y 0: 1-5 (1 to 5 V) 1: 0-10 (0 to 10 V) Setting of analogue output (Voltage output type only) 1 R/W FrEE (Analogue

Digital Pressure Switch

1 V or less -19No.PS-OMX1005 -C NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less Analog voltage output Output impedance approx. 1 k -D NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less Analog current output Max. load impedance 300 at 12 V power supply voltage 600 at 24 V power supply voltage Min. load impedance 50 -E PNP open collector

Thermo-chiller

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 460 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 460 VAC 5 q Ambient temperature

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C

Digital Flow Monitor

(increment of 0.1 sec.), 1 to 10 sec. (increment of 1 sec.), 20 sec., 30 sec.

3

1 !2 q w e r t y !1 !0 o i u Component Parts No.

Air Cylinder Series MB

(Non-lube) 50 to 700mm/s 50 to 1000mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance Cushion Note 1) Both ends (Air cushion) JIS class 2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting Basic, Foot, Front flange, Rear flange, Mounting Single clevis, Double clevis, Center trunnion

LV50-OMQ0004

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

CL

1 !2 !3 !4 !5 !6 !7 No.

Compact Guide Cylinder End Lock Type SeriesMGP

Series MGP Dimensions 4-MM depth ML 4-OA through 4-OB depth of counter bore OL Section XX HA:T-slot for hexagon bolt Section XX Z WA L 4-YY depth YL 4-NN through Section XX DL X0.02 X T R X0.02 X0.02 DA VB VA H 24 11 PW X U DB End lock mechanism non-locking type manual release ( ) XAH7 depth XL XAH7 depth XL GC XAH7 depth XL 2-P (plug) 2-P Q GA LL GB PB J K WB WA Z G PA + Stroke C + Stroke

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)

Symbol: 10R2 (Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm), CE Compliant: Q (CE Compliant)