LV50-OMQ0002

Time Accumulated pulse output mode 50 msec Time -35No.LV50***-OMQ0002-G [F 2] Setting of OUT2 Set the output mode of OUT2.

IDX-OM-W038

D 5 3-4 IDH Series 52 5. 1 IDX-OM-W038 . 6 6.1 IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 1),2) 100500L/min (ANR) 200800L/min (ANR) 540 0.31.0MPa 1535 (85%) 1530 0.150.85MPa 0.15MPa 400L/min (ANR) 600L/min (ANR) 0.7MPa 35 30 30 3) 10 4) 0.1 0.5 () 5) AC100V AC200V AC230V AC100V AC200V AC230V 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 4.2A 2.1A 2.1A 9.4A 4.8A

VCW

1/2: 0.62 3/4: 0.78 4 0.60 14 0.73 1.3 5 0.85 20 0.47 0.7 VCW4 3.0 4 7 1.4 33 0.22 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-52 in model selection regarding port size and orifice size combinations.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

90

50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

Suction Guard (Produced upon receipt of order) FHG Series

L-type block (75) (50) W R P Q Port size Weight (kg) d K W Y AE (mm) (75) (50) W J W (mm) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 47 47 47 50 50 50 50 50 70 70 70 85 85 85 105 105 9 9 9 9 9 9 9 9 62 62 62 65 65 65 65 65 3.5 3.5 3.5 6.2 6.2 6.1 11.9 11.9 Port size Weight (kg) E J P Q Port size Weight (kg) E 69

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

bolt) and M4 x 0.7 (Hexagon nut) M3 x 0.5 x 10 L (Hexagon socket head cap screw) 2 x M4 x 0.7 through Steel ball Steel ball (14+ST) (16) 4 2 x M3 x 0.5 through 6 (mm) ST 10 20 30 40 50 14+ST 24 34 44 54 64 17+ST 27 37 47 57 67 49.5+ST 59.5 69.5 79.5 89.5 99.5 61+ST 71 81 91 101 111 Part no.

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Nil F N Rc (PT) G (PF) NPT Manual override Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Other Electrical entry Light/Surge voltage suppressor G E T D DO Grommet Grommet terminal Conduit terminal DIN terminal DIN terminal (Without connector)

Series HAW Water Cooled Aftercooler 1

JIS Symbol 14-15-5 2 Series HAW How to Order Precautions HAW 22 14 D Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table Dimensions: MXP12 1122Z 3 Metal stopper V K Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

I/O Configurator (NFC version)

Based on the example of Diagnostic allocation of the Operation Manual (page 50).

I/O Configurator (NFC version)

Based on the example of Diagnostic allocation of the Operation Manual (page 50).

I/O Configurator (NFC version)

Based on the example of Diagnostic allocation of the Operation Manual (page 50).

CG1-SMV13_en

Rc 1/8 7 ~ 9 Rc 1/4 12 ~ 14 Fluid Compressed Dry Air 7 Limitations of Use Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment V K C 5 C Max. 4 20

ASR

Flow valve High pressure side Series ASQ If the load ratio at the set pressure of the flow valve exceeds 50%, install a dual speed controller (meter-in and meter out control) on the high pressure side.

Digital pressure switch for energy-saving control ejector

Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -51NO.ZL3-OM00701-A Error No.

3 Port Solenoid Valve

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Refer to back page 50 for Safety Instructions, pages 543 to 546 for Flow Control Equipment Precautions, and pages 573 to 575 for Specific Product Precautions.