Compact and Lightweight 100 100 100 100 100 Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 80 80 80 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Air consumption 60 60 60 60 60 60 Suction flow rate Air consumption 40 40 40 40 40 40 Suction flow rate 20 20
R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.
r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole
The indicator light is lit when switch is off for D-P70 and D-P75. Thus, leak current is EXPECTED (D-P70 .. Max. 1 .8 mA, D-P75.. Max. 1.2 mA). This leak current could interfere the micro current control circuit.
The indicator light is lit when switch is off for D-P70 and D-P75. Thus, leak current is EXPECTED (D-P70 .. Max. 1 .8 mA, D-P75.. Max. 1.2 mA). This leak current could interfere the micro current control circuit.
Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke(mm) (mm) I H J Q: 6 Q: 8 Stroke A B C D E F H I J Y Model R S R S 20 +10 3 0 ZPR40F10-0-A14 ZPR50F10-0-A14 30 40 43 12.5 18.5 32.3 49.5 61.5 129.5 5 +20 +7 50 12.8 24.3 15.2 26.2 50 50 53 13.5 19.5 33.3 50.5 62.5 130.5 6 +25 +40 +52 15
kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 () 1 ON ( +)ON ()ON OFF Yes 2 No ( OFF +)ON 1 ()ON 3 ()ON 1,3 OFF 4 5 ON OFF 6 7 8 -23No.PS-OMF0005CN-E No.
0 0 V R [CR] + 0 1 2 3 4 5 (10 ) 28 - # 0 0 D R [CR] No.
Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.
Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal
XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.
1 Drain q r e w t i u y o !0 !
Ol5 (M5) o.z 0r5 -oz -Body ported {wjth bracket} NVKF332Y {Low watlaqe: 2WDC) NVKF332V {Vacuum) l Ton-100 PSI (-100 KPa-o.7 MPa) NVKF332W tLow wattaoe + Vacuuml 0.181 lbs (80 s0 NVKF333 0-100 PSI {0-0.7 MPa) NVKF333Y ilow waltaqe: 2WDC) NVKF333V (Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5
, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150
Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...
Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...
PSI pneumatic system to carry air at a 1 PSI loss per 100 feet.