C95

Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z : Manufactured upon receipt of order.

IDX-OM-W032

3/h 273 m 3/h 390 m 3/h 660 m 3/h m 3/min (ANR) 1 7 oC 231 m 3/h 347 m 3/h 432 m 3/h 720 m 3/h 10 oC 254 m 3/h 382 m 3/h 510 m 3/h 822 m 3/h 0.7MPa 35 oC 25 oC 230V 50Hz 550 oC 0.15MPa 1.0MPa 24085% AC230V10 50Hz (4) (2) 4.3A 6.1A 7.9A (2) 760W 1390W 1700W (3) 10A 20A R407C(HFC) 42010g 73010g 55010g 67010g R1 R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA

3 Port Solenoid Valve Series VQ100 1

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

Refrigerated Air Dryer

0.4 [9 to 11 mm]) Drain tube (O.D.: 0.4 [10 mm], Length: 39.4 [1.0 m]) J P L K 4 to 0.5 [4 to 13 mm] M N Dimensions Unit: inch [mm] A B C D E F G H J K L M N P Q R Model Port size 31.5 [800] 34.2 [868] IDFB55E 2 18.5 [470] 33.7 [855] 5.0 [128] 17.9 [455] 4.3 [110] 9.8 [250] 2 [50] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

M max is the allowable moment. 2 = M/M max MY 2. Static moment CY 3 = Me/Me max Review Me1, Me3. Me max is the allowable moment. 3.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

reduces flow setting time

NPT thread r !

CYV

finds the load factors (n) of the items below, where the total (n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max Note Item Review m. m max is the maximum load mass. 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

finds the load factors (n) of the items below, where the total (n) does not exceed "1". n = 1 + 2 + 3 1 Load factor n 1 = m/m max Note Item Review m. m max is the maximum load mass. 1.

ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

HRX-OM-W002

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Booster Regulator/Air Tank

5 10 22 38 VBATmS1-m-X104 20 ARJ Max. operating pressure (MPa) 1.5 1.0 AR425 to 935 IN port size 3/8 1/2 OUT port size 3/8 1/2 1/2 3/4 ARX Ambient and fluid temperature (C) 0 to 75 Installation Horizontal (Floor mounting) AMR Weight (kg) VBATmA1-m-X104 6.6 11.5 14 21 VBATmS1-m-X104 5.3 8 13 19 ARM Material VBATmA1-m-X104 Carbon steel (Equivalent to SS400) VBATmS1-m-X104 Stainless steel (

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .

S Couplers

1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 Without check valve 1 1 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.