F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

MXQ

Find the load factor 2 of the static moment. 3-3 Load Factor of Dynamic Moment Pitching Examine Mep. (30 + 10.5) Mep = 1/3 x 16.8 x 9.8 x = 2.2 1000 We = 4/100 x 10 x 420 = 16.8 A2 = 10.5 Meap = 1 x 0.7 x 18 = 12.6 K = 1 = 0.7 Mpmax = 18 3 = 2.2/12.6 = 0.17 (Ln + An) Me = 1/3 We x 9.8 1000 Collision equivalent to impact We = W V : Bumper coefficient Rubber stopper without adjuster =

Step Motor Controller (Servo / 24 VDC)

NPN type PNP type I/O signal power I/O signal power A1 COM CN5 24 VDC A1 COM CN5 24 VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 Load B4 OUT3 B5 OUT4

Compact Manifold Regulator Series ARM5

1361213613VEF VEP Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.

LEC-OM069xx

Battery (Cell) : LEC-JZ-CVBAT Lithium content : 0.31(g) 11 Harmonized Standards European Directives Model European Directives Harmonized Standards Machinery Directive 2006/42/EC EN ISO13849-1: 2008 EN 954-1 LECY-V (SGDV) EN 55011 /A2 group 1, class A EN 61000-6-2 EN 61800-3 DRIVER EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC EN 50178 EN 61800-5-1 EN 55011 /A2 group 1, class

LEC-OM071xx

Battery (Cell) : LEC-JZ-CVBAT Lithium content : 0.31(g) 11 Harmonized Standards European Directives Model European Directives Harmonized Standards Machinery Directive 2006/42/EC EN ISO13849-1: 2008 EN 954-1 LECY-V (SGDV) EN 55011 /A2 group 1, class A EN 61000-6-2 EN 61800-3 DRIVER EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC EN 50178 EN 61800-5-1 EN 55011 /A2 group 1, class

OMR0031

NPN type -PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

OMR0032

Wire the product while referring to the wiring diagram below. (1) NPN type (2)PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Servo Motor Controller (24 VDC)

Please wire referring to the following diagram * NPN type * PNP type A1 COM CN5 I/O signal power 24VDC A1 COM CN5 I/O signal power 24VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load B3 OUT2 Load

One-touch Fittings

D2 D1 Connection thread H Release button dimensions X Y Male Branch Tee: KQ2T-G (Sealant) Connection thread R Model H (Width across flats) Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 A2 M Applicable tubing O.D.

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

S Couplers Series KK/KKH/KK13

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 175 Series KKH Dimensions/Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Mass g A2 Model A1 T KKH3S-01MS R 1/8 36.0 6.0 20.4 20.3 33.5 39.1 36.6 14 -02MS 20.2 R 1/4 1/8 34.0 9.0 19.4 31.5 39.5 37.0

Rotary Cylinder Series MRQ Size: 32, 40 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area

LEF-OM007xx

A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40

LECA6_C

B13 A13 B13 CN5 -A1 COM DC24V 24V A2 COM DC24V 0V A3 INO Bit No.

LECP6_C

6.1 / . . 1 1 2 11 2 13 3 DC24V10 3 DC30V 4 ON 3.5mA20(DC24V ) 4 10mA 5 OFF 1.5mA 11V 5 2.0V() 6.2 /(NPNPNP ) /NPN LECP6NPNP LECP6P (1) I/O (NPNPNP ) NPN (a) COM+ A1 (b) IN0A3SVONA13 (a) PNP (b) (a) COMA2 (b) IN0A3SVONA13 (2) I/O NPN OUT0B1 ALARMB13 COMA2 PNP COM+ A1 OUT0B1 ALARMB13 23 - 63 / I/O A1 B1 A1 A13 B1 B13 A13 B13 CN5 PLC -A1 COM DC24V /24V A2

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

NPN Type PNP Type I/O signal power I/O signal power CN5 CN5 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 MODE A8 MODE A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 Load B1 OUT0 Load B2 OUT1 B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 B4 OUT3 Load Load B5 OUT4

3

Load at the end of lever arm = m a2 = m1 + m2a22 + k a12 12 3 Dk = m2 2r2 5 -X 387 MK Series Design/Selection Caution 1.

CY1F

115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25