10

9 16.5 19 15 23 6 Width across flats 10 39 19 (4 locations) K (58) 25 19 8 Closed E 9 9 25 Open F 13 13 43 G 4 x M5 x 0.8 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-16DZ 40 45 60 28 68 98 128 26 98 MHL2-16D1Z 70 75 90 58 110 170 200 50 152 MHL2-16D2Z 90 95 110 78 130 210 240 70 192 J dimension is at fully closed.

Modular Type Regulator Series AR

Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount Model Port sizes A 25 40 53 53 70 75 90 95 J 25 30 30 41 50 50 70 70 B 58 94

XL-OMY0002

3 b b Nm a Nm 1 2 4 XLD-25 1.5 0.3 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 a M M0.2MPa b b O a 19 XL-OMY0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 Tamagawa Seiki Co., Ltd. to 100 Matsushita Electric Industrial Co., Ltd. to 50 Mitsubishi Electric Corporation Yaskawa

Single Axis Electric Actuator Series LJ1

Electric Corporation 30W to 100 LXSHABC LXSHABD LXSHABC-B LXSHABD-B to 50 Note) Series LXF is only compatible with motors manufactured by Mitsubishi Electric Corporation. to 100 to 50 to 100 6

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

B A B A PB B A N.C. N.O. Double acting Double acting With flow rate adjustment N.C. PA PA B A B A PB Double acting N.C. Double acting 17-5-50 9 Series LVD High Purity Chemical Valve (Compact Type) Standard Specifications LVD40 LVD50 LVD30 LVD20 Model Metric 12 19 10 6 Tubing O.D.

Pin Clamp Cylinders

A: Lock unit holding bolt R 075 CKQG32X B 08 CKQG32X CK1 B: Cylinder holding bolt Guide pin diameter * Refer to Table 1 (Symbol 2) below. Applicable hole diameter of workpiece * Refer to Table 1 (Symbol 1) below.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

: JIS B 8471, 8472, 8473 Cv 2.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ Body (B) Thread 3 x Q1 For unit mounting MSZ Body (B) CRQ2X MSQX A port B port Through hole Body (A) MRQ Body (A) Hexagon socket head set screw M5 (Hexagon socket head set screws are not availableif Body (B) has no machined threads.)

5 Port Air Operated Valve

Series Type 40: VV5FA5-40-2-02: Common exhaust 6.5 L2 L1 28 4 x 7 20.5 (For mounting) 13 66 50.5 59.5 B A B A B A B A B A PE PE 47 47 R P R R R 138 27.5 119 55 71 79 P 1.3 3/8 [1 (P), 3/5 (R) port ] 30 (Pitch) P=33 1/8 (Pilot port: Upward) M5 x 0.8 (Breathing hole) (Station n) (Station 1) 1/8 [Pilot port: Lateral (-P)] 78 55.5 32.5 24 1/4 [4 (A), 2 (B) port ] A A B B 30 (Pitch) P=33 Dimensions

LVQ

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

SMC Electronic Switch Series Variations

Starting Finished Absorbed Absorbed Absorbed Absorbed A P1 Vacuum P2 51 50 49 51 Set value [kPa] 49 Effective area of pressure indication at 50[kPa]. Pressure indication No absorbed No No No Present pressure [kPa] B No Time Time ON NOTE) Make sure to generate a vacuum before calibration. NOTE) Make sure to continue vacuum when finished.

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Speed Controller with One-touch Fitting

When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body A. If the tool is in contact with the body A, this may cause the body B to come off.

ISA2

100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

MHL2

Switch operating position (ON) Hysteresis Switch reset position (OFF) Unit: mm Auto switch model Air gripper D-Y7 W N B D-Y59A B D-Y69A B D-Y7 WV N B D-Y7BA 0.8 0.6 0.7 0.5 MHL2-10Dl Note)Use a watchmakers screwdriver with a grip diameter of 5 to 6mm to tighten the auto switch set screw. Use a tightening torque of 0.05 to 0.1 Nm.

Sine Rodless Cylinder Series REBR Direct Mount Type

-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

CEx-OMQ0011

8370: JIS B 9960-1:-((1:) JIS B 8433-1:2007--1 *2) 1. 2. 3. a. b. c. 4. a. b.