Process Pump

40 50 5 0 10 15 20 25 Discharge rate (L/min) Discharge rate (L/min) PAF3410 Air Consumption PAF5410 Air Consumption 200 SUP = 0.5 MPa 300 SUP = 0.5 MPa Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 0 10 15 20 25 5 0 20 30 40 50 10 0 Discharge rate (L/min) Discharge rate

Peltier-type Chiller Thermo-con/ Compact Type

40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

MHL2

0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0 10 20 30 40 50 60 70 0 20 40 60 80 100 120 0 20 40 60 80 100 120 10 20 30 40 50 60 70 0 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) MHL2-25D1 2 MHL2-20D1 2 MHL2-20D MHL2-25D 200 200 120 120 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa 160 160 Gripping force (N) Gripping

IDX-OM-W023

T 100 2 () 100 IDU Series 4-1 4 1 IDX-OM-W023 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDU Series 4-2 4 2 IDX-OM-W023 4 30 (2) 30 () O IDU Series 4-2 4 3 IDX-OM-W023 4 AD48-A 1 IDU8E/11E/15E1 ) 20193 20192SERIAL No.XPAD48 SMC WEB IDF-S0002 1 IDU8E/11E/15E1 C42FP-260S 1 IDU8E/11E/15E1 IDF-S1933 1 IDU8E/11E/15E1 2 IDU Series 4-2 4 4 IDX-OM-W023 5 5 5-1 3 ON OFF () 3 2

AN

Rc(PT) 3 8 28 to 30 Rc(PT) 1 2 28 to 30 Rc(PT) 3 4 36 to 38 Rc(PT)1 AN103-KM6 AN103-X233 AN103-X235 VEX 40 to 42 Rc(PT)1 1 4 AN203-KM8 1 2 48 to 50 Rc(PT)1 48 to 50 Rc(PT)2 3 Make sure not to apply a lateral load to the body during or after the installation.

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Rotary Table Series MSU

Basic weight Size 22.5 Single vane 162 90 1 Positioning pin hole 25 161 180 261.5 90 Adjustment bolt (A) Adjustment bolt (B) 3 30 259.5 180 For 90 rotation Single vane (S): 80 to 100 adjustable 440 90 7 50 436 180 675 90 20 Adjustment bolt (A) adjustment range Adjustment bolt (B) adjustment range 60 670.5 180 180 Allowable Loads Do not permit the load and moment applied to the table to exceed

Electric Actuator Triple Axis P&P Unit

Ball screw allowable rotation X axis specifications in-line mount (side mount) 200 20 40 W mm Motor Ball screw lead Guide Maximum work load Maximum speed Repeatability 400 750 20 40 4000 Allowable rotation rpm 20 40 3000 High rigidity direct acting guide 2000 kg mm/s mm 30 1000 15 2000 50 1000 25 2000 100(75) 1000 50(37.5) 2000 1000 0.05 (897) 1) When axes are combined, select each axis considering

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

ZPT/ZPX

width across flats 17 M22 x 1.5 Hexagon width across flats 30 9.5 10 50 9.5 Width across flats 19 H 70 Width across flats 60 4-M5 x 0.8 G 11 F E Y 4 40 C A B D Dimensions (mm) A B C D E F G H Y Model ZPT100HBJ25-B01-A22 104.5 178.5 50-B01-A22 140.5 214.5 100 103.1 68.6 106.7 47.5 60.5 35.5 75-B01-A22 180.5 254.5 100-B01-A22 215.5 289.5 ZPT125HBJ25-B01-A22 113 187 50-B01-A22 149 223 125 128.5

3 Port Solenoid Valve Series VQ100 1

/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35

Digital Gap Checker

Detection nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

ZCUK

20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

PFxx-OMO0007CN

[n_2] 2 (OUT1) 50 [F_1] 22 [n_3] 3 (OUT2) 50 [n_4] 4 (OUT2) 50 [F_2] 22 () [1nL] 3 (OUT1) [ 0] [1nH] 3 (OUT1) [ 0] [F_3] 22 [2nL] 3 (OUT2) [ 0] [2nH] 3 (OUT2) [ 0] n P -25No.PF-OMO0007CN [F_1] <> [F_1](OUT1OUT2 [F_1]) 1 (OUT1) [n_1] (20 ) [P_1] 2 (OUT1) [n_2] (20 ) [P_2] 3 (OUT2) [n_3] (20 ) [P_3] 4 (OUT2) [n_4] (20 ) [P_4] [F_1] -26No.PF-OMO0007CN [F_2] () <> [F_2](OUT1OUT2

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 13 Technical Data 1 Seal Materials Available 4 Molecular flow conductance FKM (fluoro rubber) With low outgassing, low permanent-set and low

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

63, 80 Aluminum (40) Iron (50, 63, 80) G, NPT 30, 45, 60, 75, 90 105, 120, 135 TURCK, P&F Aluminum body with reduced weight (40) Power Clamp Cylinder/CKZ2N Equivalent bore size [mm] Body material Port Arm opening angle Switch 50, 63, 80 Iron NPT, G 30, 45, 60, 75, 90 105, 120, 135 TURCK, P&F NAAMS Standards compliant Safety Instructions Be sure to read the Handling Precautions for SMC Products