Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional
Repetition Pressure characteristics Flow characteristics 0 1 10kPa 20kPa -20 Output deviation factor % F.S. 0.5 40kPa -40 Set pressure kPa Out 60kPa -60 0 Return 80kPa -80 -0.5 100kPa -100 -120 -100 -80 -60 -40 -1 0 1 1.5 0.5 2 2.5 3 3.5 -120 -20 4 Flow rate l/min (ANR) Supply pressure MPa 5 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Single unit 4-6 2-6 PWR L bracket (optional
Zone 40 :/ 1 30 " /' i 20 ;/ Danger Zone 10 SOOO 1
Port side side Minimum stroke 10 20 75 15 3.
(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel
Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction
Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specifications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.
L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3
(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.
G1/4 OUT port 0.5 to 2 0.5 to 2 20 G1/4 OUT port n-1 9 7 5 3 1 122.2 <124.2> 142.2 <144.2> 142.2 <144.2> 120 122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30
A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room
2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55
Width across flats H1 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/4 R 1/4 R 1/4 R 1/4 14 14 14 14 20 20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note) When
6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31 12. . 32 12.1 . 32 12.2 IF(IN Data) . 38 12.3 (IN Data) . 38 12.4(OUT Data) . 40 13.
Timing of Wireless Communication 20 / 40 / 100/ 200 / 500 / 1,000 / 2,000 / 5,000 msec 500 msec Activated only when protocol V.2.0 is used If wireless communication (including retries) does not succeed due to obstacles or for other reasons, it is judged to have failed after a set amount of time and disconnected. Afterwards, the Base and the Remote are reconnected.
P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.
TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.
The chart on the left illustrates the example when 100 [kPa], F.S. = 100 0 = 100 [kPa], 3.0% F.S. = 100 x 0.03 = 3 [kPa]. It means that if the tempareture is changed within the range of 0 to 50[C], the error will occur at the max. 3 [kPa].
or less 0.19 0.20 0.80 0.19 0.20 0.79 15 or less 95 Rubber seal Closed center SQ1000 10-SQ1331 39 or less 0.16 0.26 0.58 0.15 0.20 0.64 25 or less 100 Rubber seal Exhaust center 10-SQ1431 39 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less 100 Rubber seal Pressure center 10-SQ1531 39 or less 0.14 0.20 0.59 0.19 0.21 0.79 25 or less 100 Rubber seal Note 1) Values for the cylinder port size
25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).