m 400 1 m 350 Displayed value 300 5 m 250 200 150 100 50 0 0.5 0.4 0.3 0.2 0.1 0 Actual distance [mm] Nozzle Shape Internal Circuit and Wiring Example ISA3-N NPN (1 output) The nozzle shape must be similar to Fig. 1.
For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0
Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.
Weights (g) Vane style Double vane Single vane Model CRB1BW15-lS CRB1BW20-lS CRB1BW30-lS CRB1BW10-lD CRB1BW15-lD CRB1BW20-lD CRB1BW30-lD CRB1BW10-lS Rotation angle 90 180 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Body of rotary actuator 26.3 26.0 25.7 49 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange bracket ass'y 9 10 19 25 9 10 19 25 Auto switch
10] 10 L/min [CoL] OUT1 [SoG] ONOFF 2 [HYS] [oU2] OUT2 2 [2_P] [2ot] OUT2 [F 2][oU2] 39 2 [100] 100 L/min [P_2] OUT2 2 [ 10] 10 L/min [H_2] OUT2 [F 3][rES] [rES] [1. 00] 1 44 [F10][FLo] [FLo] [inS] 45 [F13][rEv] [rEv] [oFF] 46 3 [rAC] 47 [F20][inP] [inP] [F22][FrE] [FrE] 4 [oFF] OFF 49 [F30][SAv] [SAv] [oFF] 49 [PoS] [Hor] [F31][PoS] 50 [PrS] [Mid] 0.4 MPa0.6 MPa [F80][dSP]
500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.
K J E Size variations Standard strokes Model Auto switch 20 30 40 50 100 60 70 80 90 C(D)U20 20 to 32 Direct mounting type auto switch C(D)U25 C(D)U32 Features 2 Free-Mounting Cylinder with Air Cushion Series CU 20, 25, 32 How to Order CU 32 32 50 50 A A F9BW With auto switch CDU Without auto switch Number of auto switches With auto switch (built-in magnet) 2 pcs. Nil S 1 pc.
Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.
SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.
01, 23, 03, 04, 06, 07 500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.
Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It
Air operated, External pilot valve 2 port 0 to 1 Pilot pressure: 0.1 to 0.7 0 to 0.97 Pilot pressure: 0.1 to 0.7 Cylinder operated by external pilot air 7, 15, 20, 25, 32, 40, 50, 65, 80 VNC 1/8 to 3B 17-4-21 Single unit N.C./N.O. 7, 15, 20, 25, 32, 40, 50 1/8 to 2 (2B) 17-4-37 VND Single unit N.C.
RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0
Copper-free specifications (Electroless nickel plated) Possible to use from vacuum 100 kPa Applicable Tubing Tubing material Tubing O.D.
REAR CLEVIS DIMENSIONS PART # sDdg L 2 m od NUMBEF BORE BORE n,z -0.002 v -' -0 0037 2 1 9 1.87 o 1 2 CDP.34 50 40, 50,63 (55 5) (47 s) (4) (3) CDP.44 63 0,63 2 8 0 240 0 2 0 0 1 6 ( ro .1339) (71) (61) (5) (4) CDP-5A 80 0 7'l 3 0 1 0 2 0 0 1 6 r a -u.usu I '" -D 093 ' (76 5) (66 s) (5) (4) CDP.6A 80 100 o 7s -9 99?
Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa
500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 9.CN2:TB/PC 22 - 6CN 61 1 EMG+ EMG 2 EMGEMG 3 24V + 5 4 3 2 1 4 0V 5 FG FG LEC UL , UL1310 Class2 62 AWG20 (24V0V) 60 EMG AWG20 EMG+,EMG60 8mm 23 - D (100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC) (LEC)EMG+,EMG-OPEN 24 - (LEC) LEC6 (DC24V 0V ) Ry EMG+ Ry
Bore size Series CJ2 Pressure 0.5 MPa Load ratio 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Series MB, CA Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load ratio 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQC1000
Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness