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3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

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3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

PF-OMN0011_C

25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 2 1 s/2 s 3 1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 -66No.PF-OMN0011CN-C PF3W30 0.4 V ()30 ms / 2 4 7 2 /6 11 ) 5 / 12 DC1224 V10 50 mA 5P 4P (e-con) IP40( IP65) 050 () 3585R.H.() AC1000V1 50M (DC500V ) CE UL(CSA)RoHS 50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5

25

Relationship between the kinematic viscosity 50 0 1 2 3 4 5 10 20 30 40 50 100 Viscosity (mPas) Transfer is possible up to about 100 mPas.

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

-X 20Data Table (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner Cover Holding Screw Tightening Torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 8-18-11

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Digital Gap Checker

Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:

VCL

, 100, 110, 200, 220, 230 VAC (50/60 Hz) 100, 200, 220, 230 VAC (50/60 Hz) VX Rated voltage Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable voltage fluctuation 10% of rated voltage VX3 Coil insulation type Class B Class H VXA VCL20: 6 W, VCL30: 8 W, VCL40

02-mgp-e

Grease pack part no.: GR-S-010 (10 g) 127 Compact Guide Cylinder/With End Lock Series MGP Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.333 Construction @6 @4 @7 #6 @5 #5 50, 63 Non-locking type (Head end lock) $4 $5 $5 80, 100 20 to 63 The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series MGP. *BLUE links will lead to purchase pages.

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

Round Type Low Pressure Hydraulic Cylinder Series CH
M

(n = 2, 4, 6 ) 75 + 55 (n 2) 20 + 50 n 2 2 D-B59W 20 75 15 (n = 2, 4, 6 ) D-A3 D-G39 D-K39 D-A44 35 100 10 35 + 30 (n 2) 100 + 100 (n 2) n: Number of auto switches Theoretical Output Mounting Unit (N) Caution Operating pressure (MPa) Bore size (mm) Piston area (mm) Rod size (mm) 1 1.5 2 2.5 3 3.5 Operating direction 1.

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

TL/TIL

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100% Methylne chloride VX3 38% Hydrochloric acid VXA 50% Hydrofluoric acid 60% Hydrogen peroxide VN 100% Methanol LVC Methyl ethyl Ketone LVA 70% Nitric acid LVH 86% Phosphoric acid LVD 85% Caustic potash LVQ 100% Sulfuric acid LQ Note 1) Toluene Xylene LVN 100% Sodium

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

ML1C

Dispersion of the control system is not included. 100 Load 50% No load 50 500 1000 Amount of overrun Piston speed just before stop (mm/s) The graph above shows the relation between piston speed and overrun. (The length of overrun is changed, dependent on piston speed, load, piping conditions and control method.

Air Catch Sensor

50 50 0.1MPa Hysteresis (m) Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.