PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

VCB

(C) 1 to 99 VC Enclosure Dusttight, low jetproof (equivalent to IP65) VDW Environment Location without corrosive or explosive gases Valve leakage cm3/min 0 (With water pressure) VQ Mounting orientation Unrestricted Note) Vibration/Impact resistance (m/s2) 30/150 or less VX2 Rated voltage 100 VAC, 110 VAC, 200 VAC, 220 VAC, 230 VAC (50/60 Hz) Coil specifications 10% of rated voltage Allowable

VQ5000

with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical

Title not found

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Lead wire length (m) Load voltage Indicator light Auto switch model Pre-wire connector Applicable load Special function Type Electrical entry Wiring (Output) AC DC 0.5 (Nil) 3 (L) 5 (Z) None (N) C73 C80 B53 B54 B64 C73C C80C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF G59 K59 100 V Yes 12 V Relay, PLC No IC circuit 100 V or less 5 V, 12 V Reed switch Solid state switch Grommet PLC Yes

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

JXCx-OMT0032CN

CN2TB/PC () 19 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 () 4 0V 5 FG FG (LEC)(0V) ULUL1310Class2 6.2 2) AWG20(0.5mm (24V0V) 60 2) EMG AWG20(0.5mm (EMG+,EMG-) 60 8mm 20 - D(100) D 6.3 (CN2SW)ON(EMG+,EMG-) (LEC)EMG (CN2SW) RY CN4 CN2 EMG+ EMG24V 0V (CN2SW)ON EMG+,EMG-(LEC) OFF (LEC)(EMG+,EMG-) 21 - (LEC) ( LEC6) DC24V 0V Ry EMG+ Ry EMG(1) BK RLS EMG Ry C 24V 24V

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

In the case the load voltage is 100 or 200V AC. Be sure to use the contact protection box in any case mentioned above. Otherwise, the contact life may be shortened. (Due to permanent energizing conditions.)

VXH

Electrical entry Rated voltage G Grommet 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz C Conduit D DIN terminal 3 110 VAC 50/60 Hz T Conduit terminal 4 220 VAC 50/60 Hz 7 240 VAC 50/60 Hz Refer to the table (1) given below for availability. 8 48 VAC 50/60 Hz 9 Other (Only AC) Table (1) Rated VoltageElectrical Entry-Electrical Option Caution Insulation type Electrical entry Electrical option 1 (100

VT325

(Values at the initial period) VT325-C VT325-G JIS Symbol Solenoid Specifications Grommet, Conduit, DIN terminal, Conduit terminal 100, 200 VAC, 50/60 Hz, 24 VDC 15 to +10% of rated voltage 75 VA 60 VA 27 VA 17 VA 12 W Electrical entry Coil rated voltage Allowable voltage fluctuation 50 Hz 60 Hz 50 Hz 60 Hz Inrush AC Apparent power (3) Holding DC Power consumption (3) Note 3) At rated voltage

Parallel Type Air Gripper Series MHZ

Applicable Tubing Note: 1in = 25.4mm 1MPa = 145psi F = (C x 1.8) + 32 Soft nylon tubing TS0425 4 0.8 12 20 to 60 Nylon 12 Polyurethane coiled tubing TCU0425B-1 4 0.5 20 to 60 Polyurethane Specification Description/Model Nylon tubing T0425 4 1.0 13 20 to 60 Nylon 12 Polyurethane tubing TU0425 4 0.5 10 20 to 60 Polyurethane Outside diameter mm Max. operating pressure MPa Minimum bending radius

VQC

Air temperature (C) 10 0 10 30 40 50 60 20 Correction coefficient 1.06 1.04 1.02 0.98 0.97 0.95 0.94 1.08 32 Series VQC Specific Product Precautions 1 Be sure to read before handling. Refer to pages 29 through 32 for safety instructions and common precautions.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

High Power Cylinder:

200 50 100 50mm/s 20 25 32 40 0 1.0 0 2.0 10 Time [s] Cylinder size [mm] 4.10-2 Series RHC low/medium speed opration with heavy loads 20 , 25 , 32 , 40 Cushion Ring MK/MK2 RSQ/RSG The long cushion ring can absorb larger energy (in terms of speed and weight).

Micro-Mist Separator with Prefilter Series AMH

30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39

One-touch Fittings Series KQ2

(100) 71 (71) 44.5 46 16 Reference dimensions after R(PT) thread installation.

4/5 Port Air Operated Valve SYJA3000 Series

double 3 position Ambient and fluid temperature C 10 to 60 (No freezing.)

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual