2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V

V

N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc. !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 NPT1/8 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T N01 NPT1/8 Piping adapter ZS-46-N2 B Panel mount adapter *1 All texts are in both English and Japanese. Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no.

Modular F.R.L. Units

Example) AC30D-F03DE1-SV-16NR-B q w e r t y Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc N1 NPT F2 G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 + Ne Port size Nil Without auto drain C4 N.C. (Normally closed) Drain port is closed when pressure is not applied. D5 N.O.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

Table of Contents

1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

MHZ

1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

SQ1000/2000

N1: 1/8" N3: 5/32" N7: 1/4" For top ported specification, indicate "LN". Note 2) Note 1) Except double (latching) type. Note 2) Except dual 3 port valves. Note 3) For specifying two or more functions, enter symbols in alphabetical order.

SI Unit: QW (DeviceNet), Input Block Stations: 42 (4 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: DeviceNet, Input Block Stations: 3 Stations/M8: 4 Inputs 3 Pins, Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: 4 Stations/M12: 4 Inputs, Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: 5 Stations/M12: 4 Inputs, Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: 5 Stations/M12: 4 Inputs, Input Block COM: -COM, Stations: 7 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: 4 Stations/M8: 4 Inputs 3 Pins, Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: DIN Rail Mount w/o DIN Rail, US Option: Preferred US Option for DeviceNet Type

SI Unit: DeviceNet, Input Block Stations: None, Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting, US Option: Preferred US Option for DeviceNet Type

SI Unit: QW (DeviceNet), Input Block Stations: 33 (3 Stations/M8: 4 Inputs 3 Pins), Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 52 (5 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 52 (5 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 7 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 7 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)