High Vacuum Angle Valve Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.
(Inch) N1 N3 N7 N9 N11 M5 02 Symbol M5 thread 1/8" 5/32" 1/4" 5/16" 3/8" thread 1 4 Pressure Specifications VQZ100 2(A) port (2) VQZ100 VQZ200/300 Series VQZ200 Metal seal VQZ300 0.1 to 0.7 MPa (1) External pilot pressure range Note) Metric size of One-touch fittings (C) are also available.
1 N1 1 N1 MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHZ2-25 MHZ2-25 1 N1 MHZ2-32 2 MHZ2-32 1 MHZ2-40 2 MHZ2-40 1 Specifications and dimensions other than the above are the same as the basic type (including narrow type).
Cylinder port NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.
Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20
1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).
NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.
ISG Supply pressure normal Supply pressure drop Supply pressure increase ZSM P1 Set value Vacuum P1 P2 Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 P2 n1 n2 n1 n2 P2 Filled pressure Set value Reverse mode AUTO-SHIFT input n1 n2 Time Normal mode Operating normally Operating normally Operating normally ON OFF Time Time ON When the Auto Shift Function is used
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 6 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 4 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 13 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 7 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 8 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 11 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 9 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 3 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting
Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Valve Stations: 5 Stations, P, E Port Location: D (D Side), SUP/EXH Block Assembly: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)
Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Valve Stations: 3 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)
Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Valve Stations: 5 Stations, P, E Port Location: D (D Side), SUP/EXH Block Assembly: R (External Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), Valve Stations: 3 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)