Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Model Bolt Max. tightening torque Nm Max. screw-in depth (lmm) MXY6 MXY8 MXY12 1.14 2.7 5.4 3 4 5 M3 x 0.5 M4 x 0.7 M5 x 0.8 Do not turn bottom screw Piston rod Side mounting type Do not damage 3. The shock absorber is a consumable part.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

BH BI (UU) 2-M3 x 0.5 (opposite side, same location) (For front port, use hexagon socket head set screw) Q H 2-J through JA depth of counter bore JB (opposite side, same location) 1.5 S BE CA CB BF DD D BD BG A 2.2 (0.4) Note 1) SD 16 BA 2-M3 x 0.5 depth 4 BB W 2-M3 x 0.5 (For side port, use hexagon socket head set screw) N BC Note 2) For the 180 specification, the slated line area do not

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

A Mounting screw (M3 x 8L) (Accessory) Waterproof seal (Accessory) Option 2 Panel mount adapter Nil None Panel Sensor connector (4 pcs.) Front protection cover + Panel mount adapter 4C B Connector Mounting screw (M3 x 8L) (Accessory) Front protection cover Connector is not connected, but shipped together. This connector cannot be used with the PSE570 series.

CLA

I60 182 0 58 25. 52 11 .2 66 stroke ~ 70 208 0 71 296 65 12.5 80 305 80 226 0 72 315 65 I. 81 324 63 7 99 14 M18Xl .5 % -16 31 % 48.5 13 23 !

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

MGQ

(Refer to page 8-31-1.)

PSxx-OMG0001CN

No.PS-OMG0001CN-H // PSE300 2 8 9 10 10 12 14 16 19 21 23 24 31 31 33 -1No.PS-OMG0001CN-H *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

AS

Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Hexagon lock nut Round lock nut J Nil Lock nut option Body size AS AS 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to page 490 for details.)

51

Pin M10 x 1.25 10.5 12.8 14 25.6 M14 x 1.5 22 16 12 14 41.6 M18 x 1.5 28 20 16 20 50.6 M22 x 1.5 38 23 21 27 64 M26 x 1.5 44 24 24 31 72 L1 Pivoting Bracket (Order separately) (mm) Material: Iron Applicable bore size (mm) Included retaining ring 20 25, 32 40 50, 63 80 100 Dd9 Part no.

CG1

(45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5 40 40.5 42 37 50 38.5 50.5 63 49.5 46.5 48 59 80 49.5 46.5 48 69.5 100 ( ): Long stroke, bore size 20 to 100, Double rod Auto Switch Mounting Bracket and Surface St: Stroke

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Clamp Cylinder with Lock Series CLK1

Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx. Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...)

EX260-SEC-A_eng

(SI unit side) Valve manifold Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories Bit No. 1 3 5 7 1 1 5 7 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

Compact Cylinder with Air Cushion Series RQ

Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch spacer Auto switch mounting nut 4 Series RQ Dimensions/20, 25 Refer to pages 12 and 13 for proper auto switch mounting positions and height.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

EX260-SDN_eng

BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.

EX260-SPR-A_eng

M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.