Slider Type Ball Screw Drive/11-LEFS Series

How to Order 11 LEFS 16 100 B 1 1 S 6N H w e r t u y i o !0 !1 !

NCA1

2 BORE CB CD E EE(NPT) F 1 1/2 3/4 1/2 2 3/8 3/8 2 3/4 1/2 2 1/2 3/8 3/8 2 1/2 3/4 1/2 3 3/8 3/8 3 1/4 1 1/4 3/4 3 3/4 1/2 5/8 4 1 1/4 3/4 4 1/2 1/2 5/8 5 1 1/4 3/4 5 1/2 1/2 5/8 6 1 1/2 1 6 1/2 3/4 3/4 BORE G J K L LR MR 1 1/2 2 1 1/4 3/4 3/4 5/8 2 2 1 5/16 3/4 3/4 5/8 2 1/2 2 1 1/8 5/16 3/4 3/4 5/8 3 1/4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 5 2 1/4 1 1/2 7/16

Air Cylinder NCA1 Series

F 1 1/2 3/4 1/2 2 3/8 3/8 2 3/4 1/2 2 1/2 3/8 3/8 2 1/2 3/4 1/2 3 3/8 3/8 3 1/4 1 1/4 3/4 3 3/4 1/2 5/8 4 1 1/4 3/4 4 1/2 1/2 5/8 5 1 1/4 3/4 5 1/2 1/2 5/8 6 1 1/2 1 6 1/2 3/4 3/4 BORE G J K L LR MR 1 1/2 2 1 1/4 3/4 3/4 5/8 2 2 1 5/16 3/4 3/4 5/8 2 1/2 2 1 1/8 5/16 3/4 3/4 5/8 3 1/4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 4 2 1/4 1 1/4 3/8 1 1/4 1 1/4 7/8 5 2 1/4 1 1/2 7/16 1 1/4 1 1/4 7/8 6 2

AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

PSxx-OML0002CN

mmHg 1 1 -26No.PS-OML0002CN-G [F 1] OUT1 OUT1 ONON OUT1ON,OFF 29 <> [F 1] 22 [P_1] [n_1]"P""n" [P_1] [P1L][P1H] -27No.PS-OML0002CN-G ON OFF ON OFF [F 1] OUT1 1 2 2 -28No.PS-OML0002CN-G () (H_1) () (H1) (H1) (H_1) (H1) (H1) OUT1 OUT2"1""2"() P_1 P_2 -29No.PS-OML0002CN-G [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4]

CM2

Please delete the unnecessary part. 1.4-16 Series CM2 Rear Trunnion (T) CM2T Bore size Stroke (mm) Stroke range Bore K A B2 D I MM AL F N B1 G NA H NN H1 P 1/8 1/8 1/8 1/4 E 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 5 5 18 8 28 M8 X 1.25 15.5 13 15 8 24 41 M20 X 1.5 20 20 1 to 300 17 32 6 5.5 22 10 33.5 M10 X 1.25 19.5 13 15 8 30 45 M26 X 1.5 25 26 1 to 300 17 32 6 5.5 22 12 37.5 M10

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

IR1000/2000/3000

Precautions. 60 50 50 Rc 1/8 2-Rc 1/4 Pressure gauge port Port size M6 x P0.5 15.5 82 60 IR3120-0 9 Mounting hole 48 2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Applicable blanking plate assembly VK300-42-1A VV3KF3-21 05 VT 2(A) port: Rc 1/8, M5 x 0.8 Valve stations VP 01 1 station VG 20 20 stations VP 1(P) port: Rc 1/8 3(R) port: Rc 1/8 S070 Base mounted Common SUP/Common EXH VQ Type 40: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VKF334VKF VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A VQZ 1(P)

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8 x 1.25

HRX-OM-Q026

HRX-OM-Q026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 F Shaft: 12d9 Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

F F F F F Bore size 20 Bore size 25 800 8 3 7 6 5 4 8 3 7 1 6 4 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 800 6 8 6 4 8 3 7 5 3 7 4 5 1 500 1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 20 Series CHN Technical Data 3-1 Cylinder Cushion Selection Procedure Caution Use a cylinder cushion within

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

HRS100/150

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

VZS

Non plug-in type N T F Symbol 24 24 stations NPTF G Option 1 5 2 VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) 1 5 VV5ZS3-50-071-01-M5 VZS3150-5G Embedded type One-touch

Compact Type

x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 12 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-M5 0.8 thread depth 4 2-Rc1/8 thread depth 5 SS T Bore size (mm) 2 2-4.3 through