AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

Soft Start-up Valve

VAC 100 VN SY100-82-2-01 200 VAC 200 VN SY100-82-2-02 110 VAC (115 VAC) 110 VN SY100-82-2-03 220 VAC (230 VAC) 220 VN SY100-82-2-04 When making connections, please note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure) standards.

Series: 10, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: Stainless Steel Body, FKM Seal, Class B Coil, CE Compliance: -

Series: 30, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: Stainless Steel Body, FKM Seal, Class B Coil, CE Compliance: -

Series: 20, Voltage: 24VDC, Electrical Entry: Grommet / Tape Winding, Orifice: Size 10: 1.6mm; Size 20: 2.3mm; Size 30: 2mm, Material: Stainless Steel Body, FKM Seal, Class B Coil, CE Compliance: -

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Max. 1 2 Min.

MLGC

2 No.

MLGC

2 No.

Series 12-REA Sine rodless cylinder

137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

5 Port Solenoid Valve Series SQ1000/2000

) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5 232 262.5 273 10 227 249.5 275

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(0.3) 12.6 (0.7) 14.4 (0.8) 14.4 (0.8) 16.2 (0.9) 62 Series VQ1000/2000 How to Order Manifolds VV5Q 1 08 C6 GU0 2 Options Series Stations Symbol Nil VQ2000 specifications None Back pressure check valve on all stations Note 2) VQ1000 specifications None Back pressure check valve on all stations Note 2) Symbol Nil Symbol Stations 1 2 VQ1000 VQ2000 Symbol Stations 02 2 stations B B 16 16

VER2000/4000

AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

lPSMt

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

lPSMt

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

Vacuum Regulator Series IRV

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2